Search Results - "Kumar, Guru Aathavan Alagu Uthaya"
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Understanding Influence of Substrate Floor Concavity on Sensitivity and Linearity Through a Parabolic Model: Theoretical Modeling and Analysis of Performance
Published in IEEE sensors journal (01-10-2022)“…These microelectromechanical system (MEMS)-based touch mode capacitive pressure sensors (TMCPSs) are popular because of their linear sensor output and…”
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Journal Article -
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Capacitance Response of Concave Well Substrate MEMS Double Touch Mode Capacitive Pressure Sensor: Robust Design, Theoretical Modeling, Numerical Simulation and Performance Comparison
Published in SILICON (01-10-2022)“…Touch Mode Capacitive Pressure Sensor (TMCPS) is very suitable for industrial applications where pressure sensing is necessary because of their linearity,…”
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Journal Article