Search Results - "Kouassi, Sébastien"
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Integration of porous silicon in microfuel cells: a review
Published in International journal of energy research (01-01-2015)“…SUMMARY In this review, a particular emphasis is put on the integration of porous silicon in microfuel cells. After a general description of porous silicon…”
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Scalloping removal on DRIE via using low concentrated alkaline solutions at low temperature
Published in Sensors and actuators. A. Physical. (01-11-2011)“…The scalloping removal on the silicon via sidewalls after a Deep Reactive Ion Etching (DRIE) by the so-called STiGer process has been achieved using a low…”
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Proton exchange membrane micro fuel cells on 3D porous silicon gas diffusion layers
Published in Journal of power sources (15-10-2012)“…Since the 90's, porous silicon has been studied and implemented in many devices, especially in MEMS technology. In this article, we present a new approach to…”
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Macroporous silicon hydrogen diffusion layers for micro-fuel cells: From planar to 3D structures
Published in Microelectronic engineering (01-02-2012)“…In this study, we demonstrate the possibility of using macroporous silicon as a hydrogen diffusion layer in integrated planar and 3D proton exchange membrane…”
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Journal Article Conference Proceeding -
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Enabling the Use of High Precision Glass Wafers in a Conventional Si Fab
Published in IEEE transactions on semiconductor manufacturing (01-08-2023)“…Glass has unique properties that make it attractive for many applications. Combining glass with Si fabrication process would create new possibilities not only…”
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Deep trench etching combining aluminum thermomigration and electrochemical silicon dissolution
Published in Applied physics letters (22-05-2006)“…A micromachining technique for silicon deep anisotropic etching and isolating porous silicon structures is developed. This original method combines aluminum…”
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Electrical and thermal characterization of carbon nanotubes films
Published in Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures (15-06-2011)Get full text
Journal Article