Search Results - "Kothnur, Prashanth"
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1
Experimental and numerical study of external plume Characteristics in microhollow cathode discharges
Published in IEEE transactions on plasma science (01-04-2005)“…Microhollow cathode (MHC) discharges are a class of miniature nonequilibrium high-pressure plasma discharges characterized by intense radiation and high gas…”
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Journal Article -
2
Modeling and Optimizing the Impact of Process and Equipment Parameters in Sputtering Deposition Systems Using a Gaussian Process Machine Learning Framework
Published in IEEE transactions on semiconductor manufacturing (01-05-2022)“…We present a method for empirically modeling and optimizing variations in sputtering deposition processes using Gaussian Process (GP) machine learning methods…”
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Journal Article -
3
Structure of direct-current microdischarge plasmas in helium
Published in Applied physics letters (27-01-2003)“…A one-dimensional, self-consistent, continuum model is used to elucidate plasma phenomena in a parallel-plate dc microdischarge with a 250 μm gap at a pressure…”
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Journal Article -
4
Simulation of direct current microdischarges for microthruster applications
Published 01-01-2005“…The structure of direct-current microdischarges (MDs) is investigated using a detailed two-dimensional multispecies continuum model. MDs are direct-current…”
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Dissertation
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5
Simulation of direct current microdischarges for microthruster applications
“…The structure of direct-current microdischarges (MDs) is investigated using a detailed two-dimensional multispecies continuum model. MDs are direct-current…”
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Dissertation -
6
Decoration of particles by thin tantalum films
Published in 2010 IEEE Nanotechnology Materials and Devices Conference (01-10-2010)“…Surface particle defects smaller than the minimum detection limit (MDL) of particle detection metrology, may, after a thin-film deposition step, get decorated…”
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Conference Proceeding