A Triple-Protection Structured COB FRAM with 1.2-V Operation and 1017-Cycle Endurance
We have developed a ferroelectric RAM (FRAM) with a low operation voltage of 1.2 V and a high switching endurance up to 1017 cycles. Our newly developed triple-protection structured cell array, has constructed without an additional mask step, effectively protects 0.4-μm 2 ferroelectric capacitors fr...
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Published in: | 2015 IEEE International Memory Workshop (IMW) pp. 1 - 4 |
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Main Authors: | , , , , , , , , , , , , , , , , |
Format: | Conference Proceeding |
Language: | English |
Published: |
IEEE
01-05-2015
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Subjects: | |
Online Access: | Get full text |
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Summary: | We have developed a ferroelectric RAM (FRAM) with a low operation voltage of 1.2 V and a high switching endurance up to 1017 cycles. Our newly developed triple-protection structured cell array, has constructed without an additional mask step, effectively protects 0.4-μm 2 ferroelectric capacitors from hydrogen and moisture degradation. We have designed our capacitor-over-bit-line (COB) structure to have a small cell size of 0.5 μm 2 . |
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ISBN: | 9781467369312 1467369314 |
ISSN: | 2159-483X |
DOI: | 10.1109/IMW.2015.7150275 |