A Triple-Protection Structured COB FRAM with 1.2-V Operation and 1017-Cycle Endurance

We have developed a ferroelectric RAM (FRAM) with a low operation voltage of 1.2 V and a high switching endurance up to 1017 cycles. Our newly developed triple-protection structured cell array, has constructed without an additional mask step, effectively protects 0.4-μm 2 ferroelectric capacitors fr...

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Bibliographic Details
Published in:2015 IEEE International Memory Workshop (IMW) pp. 1 - 4
Main Authors: Saito, Hitoshi, Sugimachi, Tatsuya, Nakamura, Ko, Ozawa, Soichiro, Sashida, Naoya, Mihara, Satoru, Hikosaka, Yukinobu, Wensheng Wang, Hori, Tomoyuki, Takai, Kazuaki, Nakazawa, Mitsuharu, Kosugi, Noboru, Okuda, Masaki, Hamada, Makoto, Kawashima, Shoichiro, Eshita, Takashi, Matsumiya, M.
Format: Conference Proceeding
Language:English
Published: IEEE 01-05-2015
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Summary:We have developed a ferroelectric RAM (FRAM) with a low operation voltage of 1.2 V and a high switching endurance up to 1017 cycles. Our newly developed triple-protection structured cell array, has constructed without an additional mask step, effectively protects 0.4-μm 2 ferroelectric capacitors from hydrogen and moisture degradation. We have designed our capacitor-over-bit-line (COB) structure to have a small cell size of 0.5 μm 2 .
ISBN:9781467369312
1467369314
ISSN:2159-483X
DOI:10.1109/IMW.2015.7150275