Search Results - "Korobitsina, J.L"
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1
Numerical simulation of the thermal oxidation of silicon in N 2O ambient
Published in Solid-state electronics (1995)Get full text
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Numerical simulation of the thermal oxidation of silicon in N2O ambient
Published in Solid-state electronics (01-05-1995)Get full text
Journal Article -
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NUMERICAL SIMULATION OF THE THERMAL OXIDATION OF POLYCRYSTALLINE SILICON
Published in Compel (01-04-1993)“…The model of the thermal oxidation of polycrystalline silicon is described. It includes parabolic equation system for the diffusion process of oxidant in…”
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4
NUMERICAL SIMULATION OF THE THERMAL OXIDATION OF SILICON
Published in Compel (01-04-1992)“…Computer code complex for the thermal oxidation of silicon is presented. There are one-dimensional model and two- dimensional models:the model of viscoelastic…”
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