Search Results - "Korobitsina, J.L"

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    NUMERICAL SIMULATION OF THE THERMAL OXIDATION OF POLYCRYSTALLINE SILICON by Gadiyak, G.V., Korobitsina, J.L., Kramarenko, V.I.

    Published in Compel (01-04-1993)
    “…The model of the thermal oxidation of polycrystalline silicon is described. It includes parabolic equation system for the diffusion process of oxidant in…”
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    Journal Article
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    NUMERICAL SIMULATION OF THE THERMAL OXIDATION OF SILICON by Gadiyak, G.V., Korobitsina, J.L., Kranarenko, V.I.

    Published in Compel (01-04-1992)
    “…Computer code complex for the thermal oxidation of silicon is presented. There are one-dimensional model and two- dimensional models:the model of viscoelastic…”
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    Journal Article