MEMS Sensors Based on Very Thin LTCC

The application of thin LTCC is a very interesting and promising approach to the fabrication of ceramic MEMS gas sensors. The attempts to use this material were restricted till now by the thickness of commercial material (>50 μm). In this work, we found a possibility to fabricate thin LTCC membra...

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Bibliographic Details
Published in:	Proceedings Vol. 1; no. 4; p. 324
Main Authors:	Alexey A. Vasiliev, Anton V. Nisan, Gleb N. Potapov, Nikolay N. Samotaev, Konstantin Yu. Oblov, Anastasia V. Ivanova
Format:	Journal Article
Language:	English
Published:	MDPI AG 01-08-2017
Subjects:	ceramic MEMS gas sensor ink/aerosol jet printing LTCC
Online Access:	Get full text
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Summary:	The application of thin LTCC is a very interesting and promising approach to the fabrication of ceramic MEMS gas sensors. The attempts to use this material were restricted till now by the thickness of commercial material (>50 μm). In this work, we found a possibility to fabricate thin LTCC membranes (20–30 μm) stretched on a frame made of 100 μm thick LTCC. Aerosol jet printed Pt microheater and laser cutting of the membrane gave a cantilever shaped microhotplate with hot spot of about 300 × 300 μm. Power consumption of the heater is ~150 mW at 450 °C.
ISSN:	2504-3900
DOI:	10.3390/proceedings1040324