Search Results - "Konenkov, S. D."
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Synthesis of Hexagonal AlN and GaN Layers on a Si(100) Substrate by Chloride Vapor-Phase Epitaxy
Published in Technical physics (01-04-2019)“…Synthesis of AlN and GaN layers on a Si(100) substrate by chloride vapor-phase epitaxy has been considered. The process includes sulfidizing of the silicon…”
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Journal Article -
2
Semipolar III-N Layers Deposited on a Nanostructured Silicon Substrate: Process and Luminescence Specificity
Published in Bulletin of the Russian Academy of Sciences. Physics (01-07-2022)“…A study is performed of the advantages of synthesizing layers of AlN via gas-phase chloride epitaxy and layers of GaN via organometallic epitaxy on a…”
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Journal Article