Search Results - "Kolbesen, B.O."

Formation of tantalum nitride films by rapid thermal processing by Angelkort, C, Berendes, A, Lewalter, H, Bock, W, Kolbesen, B.O

“…As part of an investigation of transition metal nitrides formed by means of rapid thermal processing, the reactivity of 200/500-nm thick tantalum films…”
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Formation of vanadium nitride by rapid thermal processing by GALESIC, I, KOLBESEN, B. O

“…In the manufacturing of submicron semiconductor devices rapid thermal processing (RTP) is increasingly applied for annealing and preparation of thin films such…”
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Evaluation of the protein concentration in enzymes via determination of sulfur by total reflection X-ray fluorescence spectrometry — limitations of the method by Mertens, M, Rittmeyer, C, Kolbesen, B.O

“…Total reflection X-ray fluorescence spectrometry (TXRF) offers many advantages for the identification of trace elements in biological samples like proteins,…”
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A combined SNMS and EFTEM/EELS study on focused ion beam prepared vanadium nitride thin films by Kothleitner, Gerald, Rogers, M., Berendes, A., Bock, W., Kolbesen, B.O.

“…We investigated the diffusion profiles and core-loss fine-structures (ELNES) of thin vanadium nitride films by electron energy-loss spectroscopy (EELS) and…”
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Formation of niobium oxynitrides by rapid thermal processing (RTP) by Matylitskaya, V.A., Bock, W., Thoma, K., Kolbesen, B.O.

“…The potential of rapid thermal processing (RTP) for the preparation of thin films of niobium oxynitrides was investigated. The 200 and 500 nm niobium films…”
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Comparing the chemical properties of evaporated and sputtered niobium films on oxidized Si(1 0 0) wafers – preparation of oxynitride films by Brunkahl, O., Bock, W., Thoma, K., Kolbesen, B.O.

“…Five hundred nanometers of niobium films have been deposited on silicon(1 0 0) wafers with 100 or 300 nm thermally grown oxide by electron beam evaporation and…”
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Niobium nitride films formed by rapid thermal processing (RTP): a study of depth profiles and interface reactions by complementary analytical techniques by Berendes, A, Brunkahl, O, Angelkort, C, Bock, W, Hofer, F, Warbichler, P, Kolbesen, B. O

“…The nitridation of niobium films approximately 250 and 650 nm thick by rapid thermal processing (RTP) at 800 °C in molecular nitrogen or ammonia was…”
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Capability and limitations of the determination of sulfur in inorganic and biological matrices by total reflection X-ray fluorescence spectrometry by Steinmeyer, S, Kolbesen, B.O

“…The capability and limitations of TXRF were explored for the determination of the light element sulfur in inorganic and biological samples. The recovery rates…”
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Defects Due to Metal Silicide Precipitation in Microelectronic Device Manufacturing: The Unlovely Face of Transition Metal Silicides by Kolbesen, B.O., Cerva, H.

“…In microelectronics technology transition metals and their silicides play a prominent, but twofold role: On the one hand, selected metals like Ti, Co, Mo and W…”
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Formation of niobium nitride by rapid thermal processing by Angelkort, C, Lewalter, H, Warbichler, P, Hofer, F, Bock, W, Kolbesen, B.O

“…The formation of group V transition metal nitride films by means of rapid thermal processing (RTP) has been investigated. Here we focus on the nitridation of…”
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Scanning probe microscopy — a tool for the investigation of high- k materials by Landau, S.A, Junghans, N, Weiß, P.-A, Kolbesen, B.O, Olbrich, A, Schindler, G, Hartner, W, Hintermaier, F, Dehm, C, Mazuré, C

“…Dielectric/ferroelectric materials such as Ba x Sr 1− x TiO 3 (BST), PbZr x Ti 1− x O 3 (PZT), and SrBi 2Ta 2O 9 (SBT) are currently being investigated for…”
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Asp-193 and Glu-218 of subunit II are involved in the Mn 2+-binding of Paracoccus denitrificans cytochrome c oxidase by Witt, Heike, Wittershagen, Axel, Bill, Eckhard, Kolbesen, B.O, Ludwig, Bernd

“…Cytochrome c oxidase contains a binding site for a non-redox-active metal at the interface of subunits I and II, usually a magnesium ion. In Paracoccus…”
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Nitridation of vanadium in molecular nitrogen: a comparison of rapid thermal processing (RTP) and conventional furnace annealing by Galesic, I, Reusch, U, Angelkort, C, Lewalter, H, Berendes, A, Schweda, E, Kolbesen, B.O

“…The nitridation processes of thin V films in molecular nitrogen at atmospheric pressure in a RTP-system, a conventional tube furnace and a high temperature in…”
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Asp‐193 and Glu‐218 of subunit II are involved in the Mn2+‐binding of Paracoccus denitrificans cytochrome c oxidase by Witt, Heike, Wittershagen, Axel, Bill, Eckhard, Kolbesen, B.O, Ludwig, Bernd

“…Cytochrome c oxidase contains a binding site for a non‐redox‐active metal at the interface of subunits I and II, usually a magnesium ion. In Paracoccus…”
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Influence of silicon crystal defects and contamination on the electrical behavior of power devices by Schulze, H.-J, Kolbesen, B.O

“…Since power devices require a thick electrically active n-type silicon layer with high resistivity and a large area, their electrical characteristics are…”
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Formation of Transition Metal Nitrides by Rapid Thermal Processing (RTP) by Galesic, I., Angelkort, C., Lewalter, H., Berendes, A., Kolbesen, B.O.

“…Rapid thermal processing (RTP) was used to prepare group‐5 transition metal (V, Nb, Ta) nitride films and to study the early stages of nitrogen incorporation…”
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Total-reflection X-ray fluorescence study of electrochemical deposition of metals on a glass-ceramic carbon electrode surface by Alov, N.V, Oskolok, K.V, Wittershagen, A, Mertens, M, Rittmeyer, C, Rostam-Khani, P, Kolbesen, B.O

“…The features of electrochemical deposition and co-deposition of copper, cadmium and lead from aqueous solutions on disc glass-ceramic carbon (GCC) electrode…”
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Some aspects of the high-temperature behavior of bismuth, strontium and barium on silicon surfaces studied by total reflection X-ray fluorescence spectrometry by Kilian, G, Rommel, M, Pamler, W, Unger, E, Höpfner, A, Kolbesen, B.O

“…Thin films of novel dielectric and ferroelectric materials, such as barium strontium titanate (BST) and strontium bismuth tantalate (SBT), which are scheduled…”
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Trace element determination in drugs by total-reflection X-ray fluorescence spectrometry by Wagner, M., Rostam-Khani, P., Wittershagen, A., Rittmeyer, Claudia, Kolbesen, B.O., Hoffmann, H.

“…The capability of total-reflection X-ray fluorescence spectrometry (TXRF) for the determination of trace elements in drugs is described. Various samples of…”
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Alkaline cleaning of silicon wafers: additives for the prevention of metal contamination by Martin, A.R., Baeyens, M., Hub, W., Mertens, P.W., Kolbesen, B.O.

“…The paper presents a new strategy for cleaning of silicon wafers. A novel class of chelating agents added to alkaline cleaning mixtures provides promising…”
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