Search Results - "Ko, Changhee"
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Deposition of SiOC by plasma-free ultra-low-temperature ALD (ULT-ALD) and its passivation on p-type silicon
Published in 2017 IEEE 44th Photovoltaic Specialist Conference (PVSC) (01-06-2017)“…SiOC thin films have been successfully deposited using carbosilane compounds with ultra-low-temperature ALD (ULT-ALD) around 50°C to 70°C. This plasma-free…”
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Conference Proceeding -
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Polymer characterization by temperature gradient interaction chromatography
Published in Macromolecular chemistry and physics (01-10-1999)“…Thermodynamic principles and some applications of the temperature gradient interaction chromatography (TGIC) recently developed for the characterization of…”
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Journal Article -
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Pure Co films of low resistivity and high conformality by low temperature thermal CVD/ALD using novel Co precursors
Published in 2017 IEEE International Interconnect Technology Conference (IITC) (01-05-2017)“…A new family of highly volatile alkylsilyl-functionality Co precursors, R 3 SiCo(CO) 4 , has been synthesized. One of them, Et 3 SiCo(CO) 4 , has been…”
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Conference Proceeding -
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Substrate Dependent Growth Behaviors of Plasma-Enhanced Atomic Layer Deposited Nickel Oxide Films for Resistive Switching Application
Published in Chemistry of materials (21-12-2012)“…In this study, NiO thin films were deposited via a plasma-enhanced atomic layer deposition (PEALD) on metal (Pt, Ru, and W) substrates using a…”
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Journal Article -
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Growth of Conductive SrRuO3 Films by Combining Atomic Layer Deposited SrO and Chemical Vapor Deposited RuO2 Layers
Published in Chemistry of materials (21-12-2012)“…SrRuO3 (SRO) film was deposited by sequential executions of atomic layer deposition of SrO and chemical vapor deposition of RuO2 layers at a low growth…”
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Journal Article -
6
Synthesis and PEALD evaluation of new Nickel precursors
Published in IEEE International Interconnect Technology Conference (01-05-2014)“…A new family of oxygen and fluorine free Nickel (Ni) precursors, which are based on allyl and alkylpyrrolylimine ligands [Ni(allyl)(PCAI-R)], has been…”
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Conference Proceeding -
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Growth of Conductive SrRuO 3 Films by Combining Atomic Layer Deposited SrO and Chemical Vapor Deposited RuO 2 Layers
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Journal Article -
8
Characterization of polydisperse poly(vinyl chloride) by temperature gradient interaction chromatography
Published in Journal of Chromatography A (04-08-2006)“…Temperature gradient interaction chromatography (TGIC) was employed to fractionate a commodity polymer, poly(vinyl chloride) (PVC) with wide molecular weight…”
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Journal Article -
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Efficient flexible devices using a statistical copolymer of oxadiazole containing PPV
Published in Synthetic metals (15-02-2007)“…Flexible light-emitting diodes, with simple device architectures, fabricated using a random copolymer of hole transporting dialkoxy-substituted…”
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Journal Article -
10
Thin nickel films growth using plasma enhanced atomic layer deposition from η3-2-methylallyl N, N'-diisopropylacetamidinate nickel(II)
Published in 2013 IEEE International Interconnect Technology Conference - IITC (01-06-2013)“…Plasma enhanced atomic layer deposition (PEALD) using the novel η 3 -2-methylallyl N,N'-diisopropylacetamidinate nickel(II) precursor has been investigated. NH…”
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Conference Proceeding