The pulsed glow discharge as an elemental ion source
A pulsed glow discharge, rather than a conventional constant dc voltage discharge, is used as an ion source for a quadrupole mass spectrometer. Both sputter yield and ion signal are enhanced by using the pulsed system because of an increase in the voltage necessary to maintain a constant average cur...
Saved in:
| Published in: | Journal of the American Society for Mass Spectrometry Vol. 1; no. 2; pp. 138 - 143 |
|---|---|
| Main Authors: | , , |
| Format: | Journal Article |
| Language: | English |
| Published: |
United States
Elsevier Inc
01-04-1990
|
| Online Access: | Get full text |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Summary: | A pulsed glow discharge, rather than a conventional constant dc voltage discharge, is used as an ion source for a quadrupole mass spectrometer. Both sputter yield and ion signal are enhanced by using the pulsed system because of an increase in the voltage necessary to maintain a constant average current at the cathode over the pulse period. Irregularities are seen in the pulse spectrum that appear as rapid surges in the ion signal for both sputtered and contaminant gas species. These peaks appear at the beginning of the pulse for gaseous species but are limited to the postpulse period for sputtered species. Differnces in the signal forms allow for the discrimination against selected types of ion signals by using narrow data collection gates placed over different portions of the pulse period. |
|---|---|
| Bibliography: | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
| ISSN: | 1044-0305 1879-1123 |
| DOI: | 10.1016/1044-0305(90)85049-R |