Search Results - "Klejwa, N"
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SU-8 force sensing pillar arrays for biological measurements
Published in Lab on a chip (2009)“…The generation and sensation of mechanical force plays a role in many dynamic biological processes, including touch sensation. This paper presents a two-axis…”
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Journal Article -
2
Magnetic, Mechanical, and Optical Characterization of a Magnetic Nanoparticle-Embedded Polymer for Microactuation
Published in Journal of microelectromechanical systems (01-02-2011)“…We have characterized the magnetic, mechanical, and optical properties of SU-8 polymer with embedded nickel nanoparticles (SU8-Ni) of concentrations ranging…”
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Journal Article -
3
A reel-to-reel compatible printed accelerometer
Published in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (01-06-2011)“…This paper describes the fabrication and testing of a one-axis polymer-based capacitive accelerometer made using a reel-to-reel/roll-to-roll compatible,…”
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Conference Proceeding -
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Suppression of wear in cyclically loaded polycrystalline silicon MEMS via a thin silicon carbide coating
Published in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (01-06-2011)“…The surfaces of a microfabricated polysilicon test structure, designed to measure adhesion forces in MEMS, were modified with a thin (~50 nm) silicon carbide…”
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Conference Proceeding -
5
Temperature dependence of vacuum encapsulated resonators for humidity measurement
Published in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (01-06-2011)“…This paper demonstrates the effect of temperature on humidity measurements using a charge-biased microshell encapsulated single-anchored double-ended tuning…”
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Conference Proceeding -
6
Transparent SU-8 Three-Axis Micro Strain Gauge Force Sensing Pillar Arrays for Biological Applications
Published in TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference (01-06-2007)“…This paper presents three-axis micro strain gauge force-sensitive pillar arrays constructed of multiple layers of SU-8 and metal on quartz substrates to create…”
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Conference Proceeding -
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Laser-printed magnetic-polymer microstructures
Published in TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference (01-06-2009)“…We developed a new process for laser-printing a thin-film magnetic-polymer composite microstructural material directly onto planar silicon substrates and…”
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Conference Proceeding