Search Results - "Kinuta, Seichin"

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    Polyimide-based X-ray masks with advanced performance of pattern accuracy and thermal stability by Kinuta, Seichin, Saita, Yoshiaki, Kobayashi, Masashi, Boerner, Martin, Saile, Volker, Hosaka, Sumio

    Published in Microsystem technologies (01-08-2010)
    “…Polyimide-based X-ray masks which are generated by optical lithography and electroplating of gold absorbers on a polyimide mask membrane gain attention as low…”
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    Journal Article Conference Proceeding
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    Study on Fabrication of Ni mirror chip for space X-ray telescopes utilizing LIGA process by Horade, M, Sugiyama, S, Ezoe, Y, Mitsuishi, I, Ishizu, K, Moriyama, T, Mitsuda, K, Kinuta, S, Yamanashi, T, Ichinosawa, Y

    “…We are developing novel ultra light-weight and high-resolution X-ray micro pore optics for space X-ray telescopes. Ni mirror chip for focusing and detecting…”
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    Conference Proceeding