Search Results - "Kingsley, A.J."

Vapour pressure measurement of low volatility precursors by Rushworth, S.A., Smith, L.M., Kingsley, A.J., Odedra, R., Nickson, R., Hughes, P.

“…The introduction of new chemicals into semiconductor production processes is an expensive, time consuming exercise. A key parameter required to ensure…”
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Trimethylindium transport studies: the effect of different bubbler designs by Smith, L.M., Odedra, R., Kingsley, A.J., Coward, K.M., Rushworth, S.A., Williams, G., Leese, T.A., Purdie, A.J., Kanjolia, R.K.

“…The transport of trimethylindium (TMI) must be highly reliable throughout the lifetime of a bubbler. This study reports stability data and transport rates…”
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An accurate continuous level indication for precursor bubblers by Kanjolia, R.K., Odedra, R., Kingsley, A.J., Coward, K.M., Travis, S., Rushworth, S.A., Smith, L.M.

“…Precursors for use in metal organic vapour phase epitaxy (MOVPE) of compound semiconductor films are supplied in high integrity stainless steel containers to…”
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TMI transport studies: effect of different bubbler designs by Odedra, R., Kingsley, A.J., Leese, T., Purdie, A., Coward, K.M., Smith, L.M., Rushworth, S.A., Williams, G., Kanjolia, R.K.

“…Transport of trimethylindium (TMI) must be highly reliable throughout source lifetimes. Bubbler design is a key factor and a number of different designs have…”
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