Search Results - "Kihyun Hwang"

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  1. 1

    Electrical characteristics of SiO2/ZrO2 hybrid tunnel barrier for charge trap flash memory by Choi, Jaeho, Bae, Juhyun, Ahn, Jaeyoung, Hwang, Kihyun, Chung, Ilsub

    Published in Japanese Journal of Applied Physics (01-08-2017)
    “…In this paper, we investigate the electrical characteristics of SiO2/ZrO2 hybrid tunnel oxide in metal-Al2O3-SiO2-Si3N4-SiO2-silicon (MAONOS) structure in an…”
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    Journal Article
  2. 2

    Ge surface-energy-driven secondary grain growth via two-step annealing by Lee, Sangsoo, Son, Yong-Hoon, Park, Yongjo, Hwang, Kihyun, Shin, Yoo Gyun, Yoon, Euijoon

    Published in Thin solid films (28-11-2014)
    “…A two-step annealing method with a low thermal budget is proposed for advanced surface-energy-driven secondary grain growth of Ge films without any…”
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    Journal Article
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    Advanced Si solid phase crystallization for vertical channel in vertical NANDs by Lee, Sangsoo, Son, Yong-Hoon, Hwang, Kihyun, Shin, Yoo Gyun, Yoon, Euijoon

    Published in APL materials (01-07-2014)
    “…The advanced solid phase crystallization (SPC) method using the SiGe/Si bi-layer structure is proposed to obtain high-mobility poly-Si thin-film transistors in…”
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    Journal Article
  5. 5

    Investigation of ultra thin polycrystalline silicon channel for vertical NAND flash by Bio Kim, Seung-Hyun Lim, Dong Woo Kim, Nakanishi, T, Sangryol Yang, Jae-Young Ahn, HanMei Choi, Kihyun Hwang, Yongsun Ko, Chang-Jin Kang

    “…We have investigated thin film transistors (TFTs) with ultra-thin polycrystalline silicon (poly-Si) of 77 Å - 185 Å. The TFT charge transfer characteristics…”
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    Conference Proceeding
  6. 6

    Cu Microstructure of High Density Cu Hybrid Bonding Interconnection by Kim, Seokho, Kang, Pilkyu, Kim, Taeyeong, Lee, Kyuha, Jang, Joohee, Moon, Kwangjin, Na, Hoonjoo, Hyun, Sangjin, Hwang, Kihyun

    “…The scaling of semiconductor device below 10nm has faced the higher process difficulty and longer development periods. Three-dimensional integrated circuits…”
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    Conference Proceeding
  7. 7

    Origins of wear-induced tungsten corrosion defects in semiconductor manufacturing during tungsten chemical mechanical polishing by Choi, Seung-Hoon, Kreider, Melissa E., Nielander, Adam C., Stevens, Michaela Burke, Kamat, Gaurav, Koo, Ja Eung, Bae, Ki Ho, Kim, Hoyoung, Yoon, Il Young, Yoon, Bo Un, Hwang, Kihyun, Lee, Dong Un, Jaramillo, Thomas F.

    Published in Applied surface science (01-10-2022)
    “…[Display omitted] •W contact plugs in CMOS IC wafers have been found to undergo corrosion.•Mismatch in the CMP processing times results in extended DI rinsing…”
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    Journal Article
  8. 8

    Effect of Millisecond Annealing Temperature of Ni1-xPtx Si Formation on Leakage Current Characteristics of Static Random- Access Memory Cells by Kim, Jinbum, Park, Taejin, Lee, Seounghoon, Lee, Siyoung, Kim, Chulsung, Hyun, Sangjin, Kim, Yihwan, Hwang, Kihyun, Kim, Hyoungsub

    Published in IEEE transactions on electron devices (01-01-2019)
    “…The importance of optimizing the millisecond annealing (MSA) temperature for Pt-doped NiSi (<inline-formula> <tex-math notation="LaTeX">{\mathrm…”
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    Journal Article
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    Effect of Millisecond Annealing Temperature of Ni1- x Pt x Si Formation on Leakage Current Characteristics of Static Random- Access Memory Cells by Kim, Jinbum, Park, Taejin, Lee, Seounghoon, Lee, Siyoung, Kim, Chulsung, Hyun, Sangjin, Kim, Yihwan, Hwang, Kihyun, Kim, Hyoungsub

    Published in IEEE transactions on electron devices (01-01-2019)
    “…The importance of optimizing the millisecond annealing (MSA) temperature for Pt-doped NiSi ([Formula Omitted]Pt x Si) contact formation was highlighted by…”
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    Journal Article
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    Electrical characteristics of SiO^sub 2^/ZrO^sub 2^ hybrid tunnel barrier for charge trap flash memory by Choi, Jaeho, Bae, Juhyun, Ahn, Jaeyoung, Hwang, Kihyun, Chung, Ilsub

    Published in Japanese Journal of Applied Physics (01-08-2017)
    “…In this paper, we investigate the electrical characteristics of SiO2/ZrO2 hybrid tunnel oxide in metal–Al2O3–SiO2–Si3N4–SiO2–silicon (MAONOS) structure in an…”
    Get full text
    Journal Article
  13. 13

    Pt-doped Ni-silicide films formed by pulsed-laser annealing: Microstructural evolution and thermally robust Ni1-xPtxSi2 formation by Kim, Jinbum, Shin, Ilgyou, Park, Taejin, Kim, Jinyong, Choi, Seongheum, Lee, Sungho, Hong, Seongpyo, Lee, Hyung-Ik, Won, Jung Yeon, Kim, Taegon, Kim, Yihwan, Hwang, Kihyun, Lee, Hoo-Jeong, Kim, Hyoungsub

    Published in Journal of alloys and compounds (05-06-2019)
    “…Pulsed-laser annealing (PLA) was performed on a preformed Pt-doped Ni-rich silicide film (Ni2Si phase), and its microstructural and phase evolution were…”
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    Journal Article
  14. 14

    Acceptor-like trap effect on negative-bias temperature instability (NBTI) of SiGe pMOSFETs on SRB by Guangfan Jiao, Toledano-Luque, Maria, Kab-Jin Nam, Toshiro, Nakanishi, Seung-Hun Lee, Jin-Soak Kim, Kauerauf, Thomas, EunAe Chung, Dong-il Bae, Geumjong Bae, Dong-Won Kim, Kihyun Hwang

    “…In this work, the oxide electric field (Eox) reduction caused by negatively charged traps is proposed to explain the robustness of SiGe pMOSFETs to negative…”
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    Conference Proceeding
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    Lamellar-structured Ni-silicide film formed by eutectic solidification by Kim, Jinbum, Jung, Younheum, Lee, Sungho, Hong, Seongpyo, Choi, Seongheum, Kim, Jinyong, Park, Taejin, Lee, Eunha, Won, Jung Yeon, Lee, Hyung-Ik, Lee, Yun Jae, Kim, Bosung, Kim, Joong Jung, Kim, Yihwan, Hwang, Kihyun, Yang, Cheol-Woong, Kim, Hyoungsub

    Published in Journal of alloys and compounds (15-01-2019)
    “…Pt-doped NiSi‒NiSi2 thin films in a uniform lamellar structure with a periodicity on the scale of a few tens of nanometers were formed on Si(001) substrates…”
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    Journal Article
  17. 17

    Observation of heterostructure epitaxy of Pt-doped Ni-monosilicide on Si(001) by Kim, Jinbum, Lee, Hyangsook, Kim, Jung-Hwa, Shin, Ilgyou, Yoo, Jeongho, Kim, Seokhoon, Choi, Seongheum, Kim, Jinyong, Park, Taejin, Kim, Yihwan, Hwang, Kihyun, Lee, Eunha, Kim, Hyoungsub

    Published in Microelectronic engineering (15-01-2019)
    “…The objective of this study was to determine detailed microstructure of a Ni1–xPtxSi film formed via a melting/quenching process using high temperature laser…”
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    Journal Article
  18. 18

    Analysis of trap distribution in polysilicon channel transistors using the variable amplitude charge pumping method by Nguyen, Manh-Cuong, Jeon, Yoon-Seok, Tong, Duc-Tai, You, Seung-Won, Jeong, Jae-Kyeong, Kim, Bio, Ahn, Jae-young, Hwang, Kihyun, Choi, Rino

    Published in Solid-state electronics (01-02-2015)
    “…•Proposing a novel method to determine the trap distribution in poly-Si channel MOSFETs.•Demonstrating the validity of the method using MOSFETs with various…”
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    Journal Article
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    Highly-reliable NAND flash memory using Al2O3-inserted inter-poly dielectric by Sung-Hae Lee, Bonyoung Koo, Kihyun Hwang, Siyoung Choi, Joo-tae Moon

    Published in 2010 IEEE International Memory Workshop (01-05-2010)
    “…The improvement of device performances has been achieved successfully through OAO IPD EOT scaling, which shows that OAO IPD is applicable to sub-40nm devices…”
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    Conference Proceeding