Search Results - "Khizhnyak, E. A."

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  1. 1
    Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia

    Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia by Ermakova, E. N., Maksimovsky, E. A., Fedorenko, A. D., Shapovalova, A. A., Khizhnyak, E. A., Kosinova, M. L.

    Published in Journal of structural chemistry (01-08-2024)
    “…SiBCN films are synthesized by plasma-enhanced chemical vapor deposition at a reduced pressure and 500-600 °C. Organoelement silicon and boron compounds are…”
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  2. 2
    Specific features of etching of the (001) surface of single-crystalline silicon in KOH-based solutions

    Specific features of etching of the (001) surface of single-crystalline silicon in KOH-based solutions by Khizhnyak, E. A., Yukhnevich, A. V.

    Published in Russian journal of general chemistry (01-08-2007)
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