Search Results - "Kavari, Rahim"

Microstructure and reliability of copper interconnects by Changsup Ryu, Kee-Won Kwon, Loke, A.L.S., Haebum Lee, Nogami, T., Dubin, V.M., Kavari, R.A., Ray, G.W., Wong, S.S.

“…The effects of texture and grain structure on the electromigration lifetime of Cu interconnects are reported. Using different seed layers, [111]- and…”
Get full text

HYDROGEN-ROBUST SUBMICRON IrOx/Pb(Zr, Ti)O3/Ir CAPACITORS FOR EMBEDDED FERROELECTRIC MEMORY by Sakoda, T, Moise, T S, Summerfelt, S R, Colombo, L, Xing, G, Gilbert, S R

“…Authors have demonstrated that the scaling of IrOx(Pb(Zr, Ti)O3:PZT)/Ir capacitors can be extended into the submicrometer regime. The submicrometer IrOx/PZT/Ir…”
Get full text

Hydrogen-Robust Submicron IrO x /Pb(Zr, Ti)O 3 /Ir Capacitors for Embedded Ferroelectric Memory by Sakoda, Tomoyuki, Moise, Theodore S., Summerfelt, Scott R., Colombo, Luigi, Xing, Guoqiang, Gilbert, Stephen R., Loke, Alvin L. S., Ma, Shawming, Kavari, Rahim, Wills, Laura A., Amano, Jun

“…We have demonstrated that the scaling of IrO x (Pb(Zr, Ti)O 3 :PZT)/Ir capacitors can be extended into the submicron regime. The submicron IrO x /PZT/Ir…”
Get full text

Process integration of a direct-on-metal, non-etchback, κ= 2.5 spin-on polymer for the 0.18 μm CMOS technology node by SUM, J. C, RAY, G. W, MA, S, KAVARI, R, MACINNES, L. M, TREADWELL, C. A, DUNNE, J, HACKER, N. P, FIGGE, L. K, HENDRICKS, N

Get full text