Search Results - "Karulkar, PC"
-
1
Ultra violet sensors based on nanostructured ZnO spheres in network of nanowires: a novel approach
Published in Nanoscale research letters (01-03-2007)“…Abstract The ZnO nanostructures consisting of micro spheres in a network of nano wires were synthesized by direct vapor phase method. X-ray Photoelectron…”
Get full text
Journal Article -
2
Ultra violet sensors based on nanostructured ZnO spheres in network of nanowires: a novel approach
Published in Nanoscale research letters (03-03-2007)“…The ZnO nanostructures consisting of micro spheres in a network of nano wires were synthesized by direct vapor phase method. X-ray Photoelectron Spectroscopy…”
Get full text
Journal Article -
3
Redistribution of pads on a singulated IC die using laser direct-write ablation
Published in IEEE transactions on components and packaging technologies (01-03-2006)“…The use of laser direct-write technology is demonstrated for rapid turnaround redistribution of pads on known good integrated circuit dice. The technology,…”
Get full text
Journal Article -
4
Quality of gate oxides grown on state-of-the-art SIMOX and ZMR SOI substrates
Published in IEEE electron device letters (01-02-1993)“…The quality of 25-nm gate oxides formed on state-of-the-art SIMOX and ZMR silicon-on-insulator (SOI) substrates was studied using NMOSFETs. Circular, edgeless,…”
Get full text
Journal Article -
5
Characterization of etching of silicon dioxide and photoresist in a fluorocarbon plasma
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-09-1988)“…Reactive ion etching of silicon dioxide and positive photoresist in CHF3–C2F6–O2–He plasma in a parallel‐plate etcher is studied using the response surface…”
Get full text
Journal Article -
6
Ultra-thin SOI MOSFETs at high temperature
Published in Proceedings of 1993 IEEE International SOI Conference (1993)“…Integrated circuits operating at elevated temperatures are of interest in several applications such as automotive, well logging, aircraft, and spacecraft…”
Get full text
Conference Proceeding -
7
Detection of pinholes in the insulator deposited on aluminum metallization
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-07-1985)“…A method for detecting defects and pinholes in the insulator layer deposited on the aluminum metallization is described. This technique decorates the locations…”
Get full text
Journal Article -
8
An AFM study of surface morphology of commercial 6" SOI wafers
Published in Proceedings of 1993 IEEE International SOI Conference (1993)“…Work reported in this paper involved an extensive Atomic Force Microscopic investigation of the surface quality of 6" SIMOX SOI wafers without any epitaxy in…”
Get full text
Conference Proceeding -
9
Highly photoconducting O2-doped CdS films deposited by spray pyrolysis
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-04-1984)“…CdS films have been prepared by spraying in air solutions of thiourea with either cadmium chloride or cadmium acetate with varying mole ratio and substrate…”
Get full text
Journal Article -
10
XPS/AES investigation of cross contamination in a plasma etcher
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-05-1985)“…Although dedication of plasma etching equipment strictly to a single process is becoming a common practice in IC labs, a large number of older plasma systems…”
Get full text
Journal Article