Search Results - "Karar, Partha"

Diagnostics of Inductively Coupled Plasma Under the Influence of Immersed RF Self-Biased Substrate Electrode by Karar, Partha, Kumar, Gourav, Kar, Rajib, Patil, D. S., Dusane, Rajiv O.

“…Diagnostics of the inductively coupled plasma (ICP) generated using a flat spiral antenna are performed using radio frequency (RF) compensated Langmuir probe…”
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Ion assisted near-complete filling of high aspect ratio trenches for 3-D neutron detectors by Kumar, Gourav, Karar, Partha, Singh, Arvind, Topkar, Anita, Patil, D S, Dusane, R O

“…•Development of plasma enhanced chemical vapor deposition system.•Forward directed ions aid conformal filling of BxC into high aspect ratio trench.•94.25% fill…”
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Effect of Antenna-Substrate Distance on Quality of a-Si:H During ICP CVD Using a Flat Spiral Antenna by Karar, Partha, Kumar, Gourav, Wadibhasme, Nilesh, Patil, D. S., Dusane, Rajiv O.

“…Amorphous silicon (a-Si:H) thin films are deposited on silicon substrates by inductively coupled plasma chemical vapor deposition (ICP-CVD) using a flat spiral…”
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Langmuir Probe Diagnostics of Inductively Coupled Plasma Generated Using Flat Spiral Antenna by Karar, Partha, Kumar, Gourav, Kar, Rajib, Kewlani, Hitesh M., Patil, D. S., Dusane, Rajiv O.

“…Langmuir probe (LP) diagnostics is performed on an inductively coupled plasma (ICP) generated using a flat spiral antenna. The current-voltage…”
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