Search Results - "Kaajakari, V."

Nonlinear limits for single-crystal silicon microresonators by Kaajakari, V., Mattila, T., Oja, A., Seppa, H.

“…Nonlinear effects in single-crystal silicon microresonators are analyzed with the focus on mechanical nonlinearities. The bulk acoustic wave (BAW) resonators…”
Get full text

Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications by Kaajakari, V., Mattila, T., Oja, A., Kiihamaki, J., Seppa, H.

“…A micromechanical 13.1-MHz bulk acoustic mode silicon resonator having a high quality factor (Q=130 000) and high maximum drive level (P= 0.12 mW at the…”
Get full text

Phase noise in capacitively coupled micromechanical oscillators by Kaajakari, V., Koskinen, J.K., Mattila, T.

“…Phase noise in capacitively coupled micro-resonator-based oscillators is investigated. A detailed analysis of noise mixing mechanisms in the resonator is…”
Get full text

Thermokinetic actuation for batch assembly of microscale hinged structures by Kaajakari, V., Lal, A.

“…This paper reports on surface micromachined hinged structure assembly using thermokinetic forces in the molecular flow regime. Ultrasonic vibration energy is…”
Get full text

Third-order intermodulation in microelectromechanical filters coupled with capacitive transducers by Alastalo, A.T., Kaajakari, V.

“…Third-order intermodulation in capacitively coupled microelectromechanical filters is analyzed. Parallel-plate transducers are assumed and, in addition to the…”
Get full text

Electrostatic transducers for micromechanical resonators: free space and solid dielectric by Kaajakari, V., Alastalo, A.T., Mattila, T.

“…Three electrostatic transduction methods are analyzed for a micromechanical, longitudinal mode, beam resonator. The conventional parallel plate transducer…”
Get full text

Intermodulation in capacitively coupled microelectromechanical filters by Alastalo, A.T., Kaajakari, V.

“…A compact model for third-order intermodulation in capacitively coupled microelectromechanical filters is derived. A simple expression for the input…”
Get full text

Variable Antenna Load for Transmitter Efficiency Improvement by Kaajakari, V., Alastalo, A., Jaakkola, K., Seppa, H.

“…A wireless radio transmitter with an integrated variable-impedance antenna is demonstrated. The transmit signal is connected via a switch to the antenna at one…”
Get full text

Systematic design approach for capacitively coupled microelectromechanical filters by Alastalo, A.T., Kaajakari, V.

“…A design procedure for microelectromechanical (MEMS) band-pass filters is formulated that takes into account specifications set for carrier-to-interference…”
Get full text

Nonlinear mechanical effects in silicon longitudinal mode beam resonators by Kaajakari, Ville, Mattila, Tomi, Lipsanen, Antti, Oja, Aarne

“…The fundamental nonlinear mechanical effects in micromachined single-crystal silicon resonators are investigated. Longitudinal mode beam resonators are chosen…”
Get full text

P6H-1 Electrochemical Etching of Quartz by Rodrigue, E., Kaajakari, V.

“…We present the first results on the electrochemical etching of crystalline quartz. Used for bulk micromachining of silicon, electrochemical etching has not…”
Get full text

Microstructured polymer for shoe power generation by Ding Han, Kaajakari, V.

“…We report on a shoe power generator based on a microstructured piezoelectric polymer transducer. The properties of the transducer match regular shoe filling…”
Get full text

Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator by Koskenvuori, M., Kaajakari, V., Mattila, T., Tittonen, I.

“…A method to detect the temperature of a micromechanical resonator by measuring the frequency- shifts of two different eigenmodes is presented. The resonator is…”
Get full text

Introducing porous silicon as a getter using the self aligned maskless process to enhance the quality factor of packaged MEMS resonators by Mohammad, W., Wilson, C., Kaajakari, V.

“…Vacuum encapsulated MEMS resonators are used in frequency references and gyroscopes. We present the use of porous silicon as a getter material for MEMS…”
Get full text

Ultrasonic Nanostructured Thin Film Transducers for Flooded Member Detection by Hartmann, M., Kaajakari, V.

“…In this paper, we report a simple and accurate method to detect water in hollow pipes using a nanostructured thin film (NSTF). The NSTF was used as a…”
Get full text

Electrical control for wet etching of quartz resonators by Clower, W., Rodrigue, E., Wilson, C., Kaajakari, V.

“…We report a method to etch multiple quartz crystal resonators in parallel to accuracy better than +/-50 ppm by measuring the sample resonant frequency with a…”
Get full text

Electrostatic batch assembly of surface MEMS using ultrasonic triboelectricity by Kaajakari, V., Lal, A.

“…In this paper we present a novel method for batch assembly of polysilicon hinged structures. The method uses ultrasonic vibrations generated with an attached…”
Get full text

Ultrasonically driven surface micromachined motor by Kaajakari, V., Rodgers, S., Lal, A.

“…The first-ever all-surface micromachined ultrasonic micro-rotor is presented. The rotor is actuated by electrically driving a piezoelectric PZT plate mounted…”
Get full text

Square-extensional mode single-crystal silicon micromechanical RF-resonator by Kaajakari, V., Mattila, T., Oja, A., Kiihamaki, J., Kattelus, H., Koskenvuori, M., Rantakari, P., Tittonen, I., Seppa, H.

“…A micromechanical 13.1 MHz bulk acoustic mode (BAW) silicon resonator is demonstrated. The vibration mode can be characterized as a 2-D plate expansion that…”
Get full text

Designing capacitively coupled microelectromechanical filters by Alastalo, A.T., Kaajakari, V.

Get full text