Search Results - "KIKUTA, Hisao"

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    Fourfold rotationally symmetrically polarized laser beam for drilling a square hole by Kikuchi, Hiroshi, Mizutani, Akio, Kikuta, Hisao

    Published in Japanese Journal of Applied Physics (01-04-2016)
    “…A method of laser processing with a space-variant polarized laser beam is discussed for drilling a square hole. Fourfold rotationally symmetrically polarized…”
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    Journal Article
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    Stereo Camera System with Digital Image Correlation Method for Accurate Measurement of Position and Orientation of Positioning Stage by Horikawa, Yusuke, Mizutani, Akio, Noda, Tomoaki, Kikuta, Hisao

    “…A stereo camera system with digital image correlation (DIC) was developed for accurate measurement of the position and orientation of a precision positioning…”
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    Journal Article
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    Effective Medium Theory for Calculating Reflectance from Metal--Dielectric Multilayered Structure by Kameda, Shinji, Mizutani, Akio, Kikuta, Hisao

    Published in Japanese Journal of Applied Physics (01-04-2012)
    “…An effective medium theory (EMT) for calculating optical reflectance from a surface of metal-and-dielectric multilayered structures (MDMS) has been described…”
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    Journal Article
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    Fabrication of Microcone Array for Antireflection Structured Surface Using Metal Dotted Pattern by Toyota, Hiroshi, Takahara, Koji, Okano, Masato, Yotsuya, Tsutom, Kikuta, Hisao

    Published in Japanese Journal of Applied Physics (15-07-2001)
    “…An antireflection surface with sub-wavelength structure has been successfully fabricated on a fused silica substrate. The fabricated antireflection structured…”
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    Journal Article
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    Multi-layered resist process in nanoimprint lithography for high aspect ratio pattern by Konishi, Takaaki, Kikuta, Hisao, Kawata, Hiroaki, Hirai, Yoshihiko

    Published in Microelectronic engineering (01-04-2006)
    “…Multi-layered resist process for nanoimprint lithography is newly proposed to fabricate high aspect ratio pattern under low pressured condition. A low…”
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    Journal Article Conference Proceeding
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    Broadband Antireflection Gratings for Glass Substrates Fabricated by Fast Atom Beam Etching by Kanamori, Yoshiaki, Kikuta, Hisao, Hane, Kazuhiro

    “…We fabricated a two-dimensional subwavelength-structured (SWS) surface on a glass substrate. The SWS surface was patterned by electron-beam lithography and…”
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    Journal Article
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    Study on optical intensity distribution in photocuring nanoimprint lithography by Hirai, Yoshihiko, Kikuta, Hisao, Sanou, Toshikazu

    “…Optical intensity distribution in photocuring nanoimprint lithography is investigated. Its dependency on pattern size, optical index, and residual thickness of…”
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    Conference Proceeding
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    Synthesis of Wave Plates Using Multilayered Subwavelength Structure by Yu, Wanji, Satoh, Kazuo, Kikuta, Hisao, Konishi, Tsuyoshi, Yotsuya, Tsutom

    Published in Japanese Journal of Applied Physics (01-04-2004)
    “…The form-birefringence effect exhibited in the multilayered subwavelength structure (SWS) has been applied for the realization of wave plates. The SWS was…”
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    Journal Article
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    Imprint/Photo Hybrid Lithography Using Conventional Contact Aligner by Kawata, Hiroaki, Hirai, Yoshihiko, Kikuta, Hisao

    Published in Japanese Journal of Applied Physics (01-06-2004)
    “…Fine patterns were fabricated by a combination of imprint lithography and photo-lithography using a conventional contact aligner. A resist film was pressed at…”
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    Journal Article
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    Automatic Dose Optimization System for Resist Cross-Sectional Profile in a Electron Beam Lithography by Hirai, Yoshihiko, Kikuta, Hisao, Okano, Masato, Yotsuya, Tsutomu, Yamamoto, Kazuya

    Published in Japanese Journal of Applied Physics (01-12-2000)
    “…A computer-aided dose optimization system to obtain a modified resist cross-sectional profile is demonstrated based on resist development simulation and an…”
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    Journal Article
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    Phase-Shifting X-Ray Shearing Interferometer by Iwata, Koichi, Kikuta, Hisao, Tadano, Hiroyuki, Hagino, Hideki, Nakano, Takashi

    Published in Japanese Journal of Applied Physics (01-11-1999)
    “…We propose an X-ray shearing interferometer, where two slightly sheared X-ray beams are produced, both of which are transmitted through an object. The two…”
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    Journal Article
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