Search Results - "KIKUTA, Hisao"
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Fourfold rotationally symmetrically polarized laser beam for drilling a square hole
Published in Japanese Journal of Applied Physics (01-04-2016)“…A method of laser processing with a space-variant polarized laser beam is discussed for drilling a square hole. Fourfold rotationally symmetrically polarized…”
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Optical elements with subwavelength structured surfaces
Published in Optical review (Tokyo, Japan) (01-03-2003)Get full text
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Stereo Camera System with Digital Image Correlation Method for Accurate Measurement of Position and Orientation of Positioning Stage
Published in International journal of automation technology (05-07-2015)“…A stereo camera system with digital image correlation (DIC) was developed for accurate measurement of the position and orientation of a precision positioning…”
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Effective Medium Theory for Calculating Reflectance from Metal--Dielectric Multilayered Structure
Published in Japanese Journal of Applied Physics (01-04-2012)“…An effective medium theory (EMT) for calculating optical reflectance from a surface of metal-and-dielectric multilayered structures (MDMS) has been described…”
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Effective Medium Theory for Calculating Reflectance from Metal–Dielectric Multilayered Structure
Published in Japanese Journal of Applied Physics (01-04-2012)Get full text
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Fabrication of Microcone Array for Antireflection Structured Surface Using Metal Dotted Pattern
Published in Japanese Journal of Applied Physics (15-07-2001)“…An antireflection surface with sub-wavelength structure has been successfully fabricated on a fused silica substrate. The fabricated antireflection structured…”
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Multi-layered resist process in nanoimprint lithography for high aspect ratio pattern
Published in Microelectronic engineering (01-04-2006)“…Multi-layered resist process for nanoimprint lithography is newly proposed to fabricate high aspect ratio pattern under low pressured condition. A low…”
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Journal Article Conference Proceeding -
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Broadband Antireflection Gratings for Glass Substrates Fabricated by Fast Atom Beam Etching
Published in Japanese Journal of Applied Physics (2000)“…We fabricated a two-dimensional subwavelength-structured (SWS) surface on a glass substrate. The SWS surface was patterned by electron-beam lithography and…”
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Wave localization of doubly periodic guided-mode resonant grating filters
Published in Optical review (Tokyo, Japan) (2003)Get full text
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Optimal Design for Nonperiodic Fine Grating Structure Controlled by Proximity Correction with Electron-Beam Lithography
Published in Japanese Journal of Applied Physics (01-02-2007)Get full text
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Study on optical intensity distribution in photocuring nanoimprint lithography
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-11-2003)“…Optical intensity distribution in photocuring nanoimprint lithography is investigated. Its dependency on pattern size, optical index, and residual thickness of…”
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Conference Proceeding -
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Synthesis of Wave Plates Using Multilayered Subwavelength Structure
Published in Japanese Journal of Applied Physics (01-04-2004)“…The form-birefringence effect exhibited in the multilayered subwavelength structure (SWS) has been applied for the realization of wave plates. The SWS was…”
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Imprint/Photo Hybrid Lithography Using Conventional Contact Aligner
Published in Japanese Journal of Applied Physics (01-06-2004)“…Fine patterns were fabricated by a combination of imprint lithography and photo-lithography using a conventional contact aligner. A resist film was pressed at…”
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Numerical study on efficient optical switching based on the nonlinear phenomenon in a guided-mode resonant grating with kerr medium
Published in Optical review (Tokyo, Japan) (01-07-2005)Get full text
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Automatic Dose Optimization System for Resist Cross-Sectional Profile in a Electron Beam Lithography
Published in Japanese Journal of Applied Physics (01-12-2000)“…A computer-aided dose optimization system to obtain a modified resist cross-sectional profile is demonstrated based on resist development simulation and an…”
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Consideration of fractional fringe method on the basis of the least squares method
Published in Optical review (Tokyo, Japan) (01-07-2003)Get full text
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Measurement of Dynamic Flow Field by Optical Computed Tomography with Shearing Interferometers
Published in Optical review (Tokyo, Japan) (01-09-2000)Get full text
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Phase-Shifting X-Ray Shearing Interferometer
Published in Japanese Journal of Applied Physics (01-11-1999)“…We propose an X-ray shearing interferometer, where two slightly sheared X-ray beams are produced, both of which are transmitted through an object. The two…”
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Ability and Limitation of Effective Medium Theory for Subwavelength Gratings
Published in Optical review (Tokyo, Japan) (1995)Get full text
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