Search Results - "KASAI, Kunihiro"

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    Low-resistivity poly-metal gate electrode durable for high-temperature processing by Akasaka, Y., Suehiro, S., Nakajima, K., Nakasugi, T., Miyano, K., Kasai, K., Oyamatsu, H., Kinugawa, M., Takagi, M.T., Agawa, K., Matsuoka, F., Kakumu, M., Suguro, K.

    Published in IEEE transactions on electron devices (01-11-1996)
    “…A new low-resistivity poly-metal gate structure, W/WSiN/poly-Si, is proposed, A uniform ultrathin (<1 nm) WSiN barrier layer was formed by annealing a W(100…”
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    Journal Article
  2. 2

    Drain structure optimization for highly reliable deep submicrometer n-channel MOSFET by Matsuoka, F., Kasai, K., Oyamatsu, H., Kinugawa, M., Maeguchi, K.

    Published in IEEE transactions on electron devices (01-03-1994)
    “…A guideline for n/sup /spl minus// fully gate overlapped (FOLD) structure design optimization has been studied. From the viewpoint of reliability, the greatest…”
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    Journal Article
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