Search Results - "KASAI, Kunihiro"
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Low-resistivity poly-metal gate electrode durable for high-temperature processing
Published in IEEE transactions on electron devices (01-11-1996)“…A new low-resistivity poly-metal gate structure, W/WSiN/poly-Si, is proposed, A uniform ultrathin (<1 nm) WSiN barrier layer was formed by annealing a W(100…”
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Journal Article -
2
Drain structure optimization for highly reliable deep submicrometer n-channel MOSFET
Published in IEEE transactions on electron devices (01-03-1994)“…A guideline for n/sup /spl minus// fully gate overlapped (FOLD) structure design optimization has been studied. From the viewpoint of reliability, the greatest…”
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Journal Article -
3
A highly manufacturable high density embedded SRAM technology for 90nm CMOS
Published 2002Get full text
Conference Proceeding -
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Impact of parasitic resistance and silicon layer thickness scaling for strained-silicon MOSFETs on relaxed Si1-xGex virtual substrate
Published 2004Get full text
Conference Proceeding