Search Results - "KALUGINA, V I"

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    Research of glass materials of micromechanical elements for VHF-devices by Timoshenkov, S P, Minaev, V S, Kalugin, V V, Klochko, A V, Kalugina, I V

    “…Results of research of glass materials of micro-electromechanical systems (MEMS) for VHF devices are submitted…”
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    Conference Proceeding
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    Development of manufacture technological processes of complex profil silicon structures for VHF-devices by Timoshenkov, S.P., Kalugin, V.V., Klochko, A.V., Kalugina, I.V., Prokop'ev, E.P.

    “…Results of study and development of technological processes of deep anisotropic etching of micromechanical elements (MME) of microelectromechanical systems…”
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    Conference Proceeding
  4. 4

    R&D of Micromechanical Element Manufacturing Processes for Microwave Devices by Timoshenkov, S.P., Kalugin, V.V., Klochko, A.V., Kalugina, I.V., Zotov, S.A., Prokop'ev, E.P.

    “…Results of R&D into micromechanical element (MME) manufacturing processes for microelectromechanical system (MEMS) applications in microwave devices are…”
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    Conference Proceeding
  5. 5

    Research and Manufacture of the Micromechanical Relay for VHF Devices by Timoshenkov, S.P., Kalugin, V.V., Klochko, A.V., Kalugina, I.V., Zotov, S.A., Prokop'ev, E.P.

    “…Technological processes of manufacturing of the micromechanical relay with an electrostatic principle of management are developed. The technological scheme of…”
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    Conference Proceeding
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    Influence of technological processes on semiconductor surfaces in manufacture of microwave devices by Timoshenkov, S.P., Kalugin, V.V., Klochko, A.V., Kalugina, I.V., Prokopyev, E.P.

    “…The paper presents experimental results of investigating the influence of semiconductor wafer preparation processes on surface condition. The obtained data is…”
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    Conference Proceeding
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