Search Results - "Kátai, Sz"

Ion energy distributions and their evolution during bias-enhanced nucleation of chemical vapor deposition of diamond by Kátai, Sz, Kováts, A., Maros, I., Deák, P.

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Plasma analyser for plasma-assisted surface process diagnostics up to 100mbar by Kátai, Sz, Tass, Z, Bori, L, Hárs, Gy, Deák, P

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Plasma analyser for plasma-assisted surface process diagnostics up to 100 mbar by Kátai, Sz, Tass, Z, Bori, L, Hárs, Gy, Deák, P

“…Ion beam mass spectrometer (IBMS) has been developed for in situ, real-time monitoring of the ion composition of a plasma in the vicinity of the substrate…”
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High-Resolution Thermal Processing of Semiconductors Using Pulsed-Laser Interference Patterning by Kelly, M. K., Rogg, J., Nebel, C. E., Stutzmann, M., Kátai, Sz

“…Interference patterns from overlapping beams of an intense pulsed laser are used to realize high‐resolution thermal processing for direct structuring of…”
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Characterization of nucleation and growth of MW-CVD diamond films by spectroscopic ellipsometry and ion beam analysis methods by Pintér, I., Petrik, P., Szilágyi, E., Kátai, Sz, Deák, P.

“…The time evolution of diamond film nucleation and growth have been investigated by spectroscopic ellipsometry (SE). Rutherford backscattering spectrometry…”
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