Search Results - "Juge, Michel"

An interpretable unsupervised Bayesian network model for fault detection and diagnosis by Yang, Wei-Ting, Reis, Marco S., Borodin, Valeria, Juge, Michel, Roussy, Agnès

“…Process monitoring is a critical activity in manufacturing industries. A wide variety of data-driven approaches have been developed and employed for fault…”
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A hybrid feature selection approach for virtual metrology: Application to CMP process by KORABI, Taki Eddine, BORODIN, Valeria, JUGE, Michel, ROUSSY, Agnes

“…This paper presents a feature selection method for virtual metrology applied to a chemical mechanical planarization process in the semiconductor industry. The…”
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A Comparative Evaluation of Deep Learning Anomaly Detection Techniques on Semiconductor Multivariate Time Series Data by Tchatchoua, Philip, Graton, Guillaume, Ouladsine, Mustapha, Juge, Michel

“…In industrial processes, keeping equipment units in good operating conditions while reducing maintenance costs is one of the most important objectives to…”
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Virtual metrology for semiconductor manufacturing: Focus on transfer learning by Clain, Rebecca, Borodin, Valeria, Juge, Michel, Roussy, Agnes

“…Nowadays, virtual metrology models for semiconductor manufacturing aim to be scalable. A Virtual Metrology (VM) system is intended to cover a wide spectrum of…”
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1D ResNet for Fault Detection and Classification on Sensor Data in Semiconductor Manufacturing by Tchatchoua, Philip, Graton, Guillaume, Ouladsine, Mustapha, Muller, Julien, Traore, Abraham, Juge, Michel

“…With much attention being placed on reducing manufacturing costs and improving productivity, maintaining process tools in good operating conditions is one of…”
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