Time of flight image sensor with 7um pixel and 640×480 resolution

Time of flight (ToF) sensor with pixel size of 7×7um and VGA resolution is developed using a backside illumination (BSI) structure. Quantum efficiency (QE) of near infrared (NIR) light is improved dramatically by applying thick epitaxial layer, reflection metal and anti-reflection layer. The depth e...

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Bibliographic Details
Published in:	2013 Symposium on VLSI Technology pp. T146 - T147
Main Authors:	Seounghyun Kim, Seungwon Cha, Heewoo Park, Jooyeong Gong, Yohwan Noh, Wanghyun Kim, Seunghoon Lee, Dong-Ki Min, Wonjoo Kim, Tae-Chan Kim, Eunseung Jung
Format:	Conference Proceeding
Language:	English
Published:	IEEE 01-06-2013
Subjects:	Adaptive optics Image sensors Light emitting diodes Metals Optical sensors Reflection Silicon
Online Access:	Get full text
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Summary:	Time of flight (ToF) sensor with pixel size of 7×7um and VGA resolution is developed using a backside illumination (BSI) structure. Quantum efficiency (QE) of near infrared (NIR) light is improved dramatically by applying thick epitaxial layer, reflection metal and anti-reflection layer. The depth error ranges are 2cm and 10cm at 90% and 10% reflection condition at the distance of 7m, respectively.
ISBN:	9781467352260 1467352268
ISSN:	0743-1562