Search Results - "Jeong, Daehun"
-
1
Fabrication of a 2-D in-plane micro needle array integrated with microfluidic components using crystalline wet etching of (110) silicon
Published in Microsystem technologies : sensors, actuators, systems integration (01-09-2016)“…We propose a two-dimensional (2-D) in-plane micro-needle array with shaft sidewalls aligned parallel to the vertical (111) crystalline plane of (110) silicon…”
Get full text
Journal Article -
2
Glass reflow process for an electrical isolation and temporary support of two-dimensional microscanner
Published in 2013 International Conference on Optical MEMS and Nanophotonics (OMN) (01-08-2013)“…In a two-dimensional (2-D) electrostatic microscanner, electrical isolation for separating the current paths of the 2-D actuator and temporary support for…”
Get full text
Conference Proceeding