Search Results - "Jérisian, Robert"
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MgO insulating films prepared by sol–gel route for SiC substrate
Published in Journal of the European Ceramic Society (2005)“…Silicon carbide (SiC) is a wide bandgap semiconductor suitable for high-voltage, high-power, and high-temperature devices from dc to microwave frequencies…”
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On the optimum thickness to test dielectric reliability, in an integrated technology of power devices
Published in Microelectronics and reliability (01-12-2000)“…This paper deals with the extensive characterization of dielectric films with thicknesses from 20 to 65 nm. Thick dielectric reliability has been investigated…”
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Gettering on Cavities Induced by Helium Implantation in Si: The Case of Boron
Published in Japanese Journal of Applied Physics (2002)Get full text
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Sol–gel MgO thin films for insulation on SiC
Published in Materials science in semiconductor processing (2004)“…Silicon carbide (SiC) is a wide bandgap semiconductor suitable for high-voltage, high-power, and high-temperature devices from DC to microwave frequencies…”
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5
A comparative study of different contact resistance test structures dedicated to the power process technology
Published in Solid-state electronics (01-10-2005)“…This paper presents different contact test structures intended to characterize the metal–semiconductor interface (aluminum–silicon) for power integrated…”
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Deep trench etching combining aluminum thermomigration and electrochemical silicon dissolution
Published in Applied physics letters (22-05-2006)“…A micromachining technique for silicon deep anisotropic etching and isolating porous silicon structures is developed. This original method combines aluminum…”
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Correlation of the leakage current and charge pumping in silicon on insulator gate-controlled diodes
Published in IEEE transactions on electron devices (01-06-1993)“…The leakage and charge pumping currents were measured in gate-controlled MOS p-i-n diodes fabricated on thin SIMOX substrates. The efficiencies of the…”
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LIFETIME EXTRAPOLATION OF PZT CAPACITORS
Published in Integrated ferroelectrics (01-01-2005)“…We propose a new methodology for lifetime determination of PZT capacitors, based on accelerated tests performed at low voltages and high temperatures. We…”
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Influence of FN electron injections in dry and dry/wet/dry gate oxides: Relation with failure
Published in Journal of non-crystalline solids (01-07-1995)“…The resistances of dry and dry/wet/dry gate oxides to Fowler-Nordheim injections are compared. Two types of test MOS capacitors were used in order to verify…”
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