Search Results - "Izumi, Kohei"
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Thermal Improvement and Stability of Si3N4/GeNx/p- and n-Ge Structures Prepared by Electron-Cyclotron-Resonance Plasma Nitridation and Sputtering at Room Temperature
Published in Jpn J Appl Phys (01-09-2012)“…This paper reports on the thermal improvement of Si 3 N 4 /GeN x /Ge structures. After the Si 3 N 4 (5 nm)/GeN x (2 nm) stacks were prepared on Ge substrates…”
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Thermal Improvement and Stability of Si 3 N 4 /GeN x /p- and n-Ge Structures Prepared by Electron-Cyclotron-Resonance Plasma Nitridation and Sputtering at Room Temperature
Published in Japanese Journal of Applied Physics (01-09-2012)“…This paper reports on the thermal improvement of Si 3 N 4 /GeN x /Ge structures. After the Si 3 N 4 (5 nm)/GeN x (2 nm) stacks were prepared on Ge substrates…”
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Journal Article -
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