Search Results - "Iriuchijima, Y"

Cost of Ownership/Yield Enhancement of High Volume Immersion Lithography Using Topcoat-Less Resists by Khorram, H. R., Nakano, K., Sagawa, N., Fujiwara, T., Iriuchijima, Y., Sei, T., Takahiro, T., Nakamura, K., Shiraishi, K., Hayashi, T.

“…The complexity and extra cost associated with a resist topcoat layer has motivated the industry to transition to topcoat-less (TC-less) resist processes. By…”
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Cost of Ownership/Yield Enhancement of High Volume Immersion Lithography Using Topcoat-Less Resists by Khorram, H R, Nakano, K, Sagawa, N, Fujiwara, T, Iriuchijima, Y, Sei, T, Takahiro, T, Nakamura, K, Shiraishi, K, Hayashi, T

“…The complexity and extra cost associated with a resist topcoat (TC) layer has motivated the industry to transition to TC-less resist processes. By switching to…”
Get full text