Search Results - "Iriarte, G.F."

Synthesis of c-axis oriented AlN thin films on different substrates: A review by Iriarte, G.F., Rodríguez, J.G., Calle, F.

“…Highly c-axis oriented AlN thin films have been deposited by reactive sputtering on different substrates. The crystallographic properties of layered film…”
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High precision pressure sensors based on SAW devices in the GHz range by Rodríguez-Madrid, J.G., Iriarte, G.F., Williams, O.A., Calle, F.

“…► We deposit AlN on free standing diamond substrates for sensors applications. ► The deposit of AlN on diamond has been optimized for different film…”
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Optimization of AlN thin layers on diamond substrates for high frequency SAW resonators by Rodríguez-Madrid, J.G., Iriarte, G.F., Araujo, D., Villar, M.P., Williams, O.A., Müller-Sebert, W., Calle, F.

“…AlN/diamond heterostructures are very promising for high frequency surface acoustic wave (SAW) resonators. In their design, the thickness of the piezoelectric…”
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Growth of nickel silicide (NiSix) nanowires by silane decomposition by Iriarte, G.F.

“…Growth of single crystal nickel-silicide (NiSix) nanowires has been achieved on inert amorphous SiO 2 and Si 3N 4 substrates covered with nanometer-size Ni…”
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Fabrication of sub-100nm IDT SAW devices on insulating, semiconducting and conductive substrates by Iriarte, G.F., Rodriguez-Madrid, J.G., Calle, F.

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Synthesis of c-axis-oriented AlN thin films on high-conducting layers: Al, Mo, Ti, TiN, and Ni by Iriarte, G.F., Bjurstrom, J., Westlinder, J., Engelmark, F., Katardjiev, I.V.

“…Thin piezoelectric polycrystalline films such as AlN, ZnO, etc., are of great interest for the fabrication of thin film bulk/surface acoustic resonators…”
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SAW COM-parameter extraction in AlN/diamond layered structures by Iriarte, G.F., Engelmark, F., Katardjiev, I.V., Plessky, V., Yantchev, V.

“…Highly c-axis oriented aluminum nitride (AlN) thin piezoelectric films have been grown on polycrystalline diamond substrates by pulsed direct current (DC)…”
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Electrical characterization of AlN MIS and MIM structures by Engelmark, F., Westlinder, J., Iriarte, G.F., Katardjiev, I.V., Olsson, J.

“…Aluminum nitride (AlN) thin films have been deposited on p-Si[100] and Mo-Si[100] substrates. The sputter deposited Mo was polycrystalline, predominantly…”
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Influence of deposition parameters on the stress of magnetron sputter-deposited AlN thin films on Si(100) substrates by Iriarte, G.F., Engelmark, F., Ottosson, M., Katardjiev, I.V.

“…In this work, a systematic study of the influence of five deposition parameters, i.e., process pressure, substrate temperature, target power, and substrate…”
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Fabrication of sub-100 nm IDT SAW devices on insulating, semiconducting and conductive substrates by Iriarte, G.F., Rodriguez-Madrid, J.G., Calle, F.

“…This work describes the electron-beam (e-beam) lithography process developed to manufacture nano interdigital transducers (IDTs) to be used in high frequency…”
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Erratum: “Influence of deposition parameters on the stress of by Iriarte, G.F.

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Growth of nickel disilicide nanowires by CVD by Iriarte, G.F.

“…A systematic study of the influence of the process parameters on the growth of nickel disilicide (NiSi 2) nanowires by CVD (Chemical Vapor Deposition) has been…”
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Influence of substrate crystallography on the room temperature synthesis of AlN thin films by reactive sputtering by Iriarte, G.F., Reyes, D.F., González, D., Rodriguez, J.G., García, R., Calle, F.

“…► High-quality polycrystalline films with preferred c-axis orientation have been grown successfully on silicon and Au/Si substrates. ► AlN grew off-axis from…”
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Diamond underlayer microstructure effect on the orientation of AlN piezoelectric layers for high frequency SAW resonators by TEM by Lloret, F., Araújo, D., Villar, M.P., Rodríguez-Madrid, J.G., Iriarte, G.F., Williams, O.A., Calle, F.

“…[Display omitted] •AlN grain has lattice orientation of their c-axis perpendicular to the interface.•After 0.5micron, the c-axis is roughly well oriented for…”
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Synthesis of c-axis oriented AlN thin films on metal layers: Al, Mo, Ti, TiN and Ni by Iriarte, G.F., Bjurstrom, J., Westlinder, J., Engelmark, F., Katardjiev, I.V.

“…Thin piezoelectric polycrystalline films such as AlN, ZnO, etc are of great interest for the fabrication of Thin Film Bulk/Surface Acoustic Resonators (TFBAR)…”
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