Search Results - "Irala, D.R."
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1
Modeling reactive sputter deposition of titanium nitride in a triode magnetron sputtering system
Published in Surface & coatings technology (25-12-2011)“…In this paper, the so-called Berg's model was successfully employed in order to model the reactive sputter deposition of titanium nitride (TiN) by a triode…”
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Journal Article Conference Proceeding -
2
The effects of plasma nitriding pretreatment in steel substrates on the photocatalytic activity of TiO2 films
Published in Surface & coatings technology (15-02-2014)“…This paper presents a comparative study of TiO2 films deposited on plasma nitrided and non-nitrided carbon steel substrates. It is well known that plasma…”
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Journal Article -
3
Hysteresis-free deposition of TiOxNy thin films: Effect of the reactive gas mixture and oxidation of the TiN layers on process control
Published in Vacuum (01-03-2014)“…This paper investigates the effect of the reactive gas mixture (N2 + O2 + Ar) and oxidation of the nitride layers on the system stability during the reactive…”
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Journal Article