Search Results - "Illiberi, Andrea"

Research Update: Atmospheric pressure spatial atomic layer deposition of ZnO thin films: Reactors, doping, and devices by Hoye, Robert L. Z., Muñoz-Rojas, David, Nelson, Shelby F., Illiberi, Andrea, Poodt, Paul, Roozeboom, Fred, MacManus-Driscoll, Judith L.

“…Atmospheric pressure spatial atomic layer deposition (AP-SALD) has recently emerged as an appealing technique for rapidly producing high quality oxides. Here,…”
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Low-Temperature Dechlorosilylation Chemistry for Area-Selective Deposition of Ge 2 Sb 2 Te 5 and Its Mechanism in Nanopatterns by Sinha, Jyoti, Gallis, Leonidas, Clerix, Jan-Willem J., van der Veen, Marleen, Innocent, Jerome, Illiberi, Andrea, Givens, Michael, Nyns, Laura, Delabie, Annelies

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Low-Temperature Dechlorosilylation Chemistry for Area-Selective Deposition of Ge2Sb2Te5 and Its Mechanism in Nanopatterns by Sinha, Jyoti, Gallis, Leonidas, Clerix, Jan-Willem J., van der Veen, Marleen, Innocent, Jerome, Illiberi, Andrea, Givens, Michael, Nyns, Laura, Delabie, Annelies

“…Area-selective deposition (ASD) is a bottom-up patterning technique that is of interest for nanoprocessing and next-generation semiconductor device…”
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Atmospheric spatial atomic layer deposition of ZnOS buffer layers for flexible Cu(In,Ga)Se2 solar cells by Illiberi, Andrea, Frijters, Corne, Ruth, Marta, Bremaud, David, Poodt, Paul, Roozeboom, Fred, Bolt, Pieter Jan

“…Zinc oxysulfide (ZnOS) is synthesized at atmospheric pressure in a laboratory-scale spatial atomic layer deposition setup by sequentially exposing the…”
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Low temperature and roll-to-roll spatial atomic layer deposition for flexible electronics by Poodt, Paul, Knaapen, Raymond, Illiberi, Andrea, Roozeboom, Fred, van Asten, Almie

“…Spatial atomic layer deposition can be used as a high-throughput manufacturing technique in functional thin film deposition for applications such as flexible…”
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On the environmental stability of ZnO thin films by spatial atomic layer deposition by Illiberi, Andrea, Scherpenborg, Robert, Theelen, Mirjam, Poodt, Paul, Roozeboom, Fred

“…Undoped and indium-doped ZnO films have been deposited by atmospheric spatial atomic-layer-deposition (spatial-ALD). The stability of their electrical,…”
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Physical and chemical degradation behavior of sputtered aluminum doped zinc oxide layers for Cu(In,Ga)Se-2 solar cells by Theelen, Mirjam, Boumans, Twan, Stegeman, Felix, Colberts, Fallon, Illiberi, Andrea, van Berkum, Jurgen, Barreau, Nicolas, Vroon, Zeger, Zeman, Miro

“…Sputtered aluminum doped zinc oxide (ZnO:Al) layers on borosilicate glass were exposed to damp heat (85 degrees C/85% relative humidity) for 2876 h to…”
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Physical and chemical degradation behavior of sputtered aluminum doped zinc oxide layers for Cu(In,Ga)Se2 solar cells by Theelen, Mirjam, Boumans, Twan, Stegeman, Felix, Colberts, Fallon, Illiberi, Andrea, van Berkum, Jurgen, Barreau, Nicolas, Vroon, Zeger, Zeman, Miro

“…Sputtered aluminum doped zinc oxide (ZnO:Al) layers on borosilicate glass were exposed to damp heat (85°C/85% relative humidity) for 2876h to accelerate the…”
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On the kinetics of spatial atomic layer deposition by Poodt, Paul, van Lieshout, Joep, Illiberi, Andrea, Knaapen, Raymond, Roozeboom, Fred, van Asten, Almie

“…Spatial atomic layer deposition (ALD) is a promising technology for high deposition rate and high-throughput ALD that can be used for roll-to-roll and…”
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Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors by Illiberi, Andrea, Katsouras, Ilias, Gazibegovic, Sasa, Cobb, Brian, Nekovic, Elida, van Boekel, Willem, Frijters, Corne, Maas, Joris, Roozeboom, Fred, Creyghton, Yves, Poodt, Paul, Gelinck, Gerwin

“…In this manuscript, the authors investigate the growth of indium zinc oxide, indium zinc oxide (InZnO, IZO) as a channel material for thin-film transistors…”
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Atmospheric pressure plasma enhanced spatial ALD of silver by van den Bruele, Fieke J., Smets, Mireille, Illiberi, Andrea, Creyghton, Yves, Buskens, Pascal, Roozeboom, Fred, Poodt, Paul

“…The authors have investigated the growth of thin silver films using a unique combination of atmospheric process elements: spatial atomic layer deposition and…”
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High rate (~7 nm/s), atmospheric pressure deposition of ZnO front electrode for Cu(In,Ga)Se 2 thin-film solar cells with efficiency beyond 15 by ILLIBERI, Andrea, GROB, Frank, FRIJTERS, Corne, POODT, Paul, RAMACHANDRA, Ram, WINANDS, Hans, SIMOR, Marcel, JAN BOLT, Pieter

“…ABSTRACT Undoped zinc oxide (ZnO) films have been grown on a moving glass substrate by plasma‐enhanced chemical vapor deposition at atmospheric pressure. High…”
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High rate (~7 nm/s), atmospheric pressure deposition of ZnO front electrode for Cu(In,Ga)Se2 thin-film solar cells with efficiency beyond 15 by Illiberi, Andrea, Grob, Frank, Frijters, Corne, Poodt, Paul, Ramachandra, Ram, Winands, Hans, Simor, Marcel, Bolt, Pieter Jan

“…ABSTRACT Undoped zinc oxide (ZnO) films have been grown on a moving glass substrate by plasma‐enhanced chemical vapor deposition at atmospheric pressure. High…”
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Positron Annihilation Studies on the Damp Heat Degradation of ZnO:Al Transparent Conductive Oxide Layers for CIGS Solar Cells by Shi, Wenqin, Theelen, Mirjam, Gevaerts, Veronique, Illiberi, Andrea, Barreau, Nicolas, Butterling, Maik, Schut, Henk, Egger, Werner, Dickmann, Marcel, Hugenschmidt, Christoph, Zeman, Miro, Bruck, Ekkes, Eijt, Stephan W. H.

“…Positron annihilation depth-profiling is used as an innovative tool to monitor the evolution of vacancy defects in two series of ZnO:Al transparent conductive…”
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High rate (~7nm/s), atmospheric pressure deposition of ZnO front electrode for Cu(In,Ga)Se sub(2) thin-film solar cells with efficiency beyond 15 by Illiberi, Andrea, Grob, Frank, Frijters, Corne, Poodt, Paul, Ramachandra, Ram, Winands, Hans, Simor, Marcel, Bolt, Pieter Jan

“…Undoped zinc oxide (ZnO) films have been grown on a moving glass substrate by plasma-enhanced chemical vapor deposition at atmospheric pressure. High…”
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On the Effect of the Amorphous Silicon Microstructure on the Grain Size of Solid Phase Crystallized Polycrystalline Silicon by Sharma, Kashish, Branca, Annalisa, Illiberi, Andrea, Tichelaar, Frans D., Creatore, Mariadriana, van de Sanden, Mauritius C. M.

“…In this paper the effect of the microstructure of remote plasma‐deposited amorphous silicon films on the grain size development in polycrystalline silicon upon…”
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Atmospheric pressure deposition of SnO2 and ZnO by van Deelen, J., Kniknie, B., Grob, F., Volintiru, I., Roozeboom, F., Poodt, P., Illiberi, A.

“…Transparent conductive oxide (TCO) coated glass is widely used in thin film PV. Atmospheric pressure chemical vapor deposition (APCVD) is a highly cost…”
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Ion resonance instability in the Eltrap electron plasma by Bettega, Giovanni, Cavaliere, Francesco, Cavenago, Marco, Illiberi, Andrea, Pozzoli, Roberto, Rome, Massimiliano

“…A small fraction of ions can destabilize the diocotron mode (off axis rotation) of an electron plasma confined in a Malmberg-Penning trap. In this paper a set…”
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Coherent structures in an electron beam by Illiberi, Andrea, Bettega, Giovanni, Cavenago, Marco, De Luca, Franca, Pozzoli, Roberto, Rome', Massimiliano, Tsidulko, Yuri

“…The formation and evolution of coherent structures in a low-energy electron beam produced in a Malmberg-Penning trap is investigated by means of CCD…”
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