Search Results - "IRIYE, Yasuroh"

Characteristics of on-wall in-tube flexible thermal flow sensor under radially asymmetric flow condition by Tan, Zhiyong, Shikida, Mitsuhiro, Hirota, Masafumi, Xing, Yan, Sato, Kazuo, Iwasaki, Takuya, Iriye, Yasuroh

“…We investigated the ability of an on-wall in-tube flexible thermal flow sensor to measure the flow rate under a radially asymmetric flow condition in a curved…”
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Pressure and resist thickness dependency of resist time evolutions profiles in nanoimprint lithography by Hirai, Yoshihiko, Onishi, Yuki, Tanabe, Toshiaki, Shibata, Mayuko, Iwasaki, Takuya, Iriye, Yasuroh

“…Time evolutions of the resist deformation process in thermal nanoimprint have been investigated by numerical simulation and experiments. The simulation and…”
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Characterization of orientation-dependent etching properties of single-crystal silicon: effects of KOH concentration by Sato, Kazuo, Shikida, Mitsuhiro, Matsushima, Yoshihiro, Yamashiro, Takashi, Asaumi, Kazuo, Iriye, Yasuroh, Yamamoto, Masaharu

“…We have evaluated the orientation dependence in chemical anisotropic etching of single-crystal silicon. Etch rates for a number of crystallographic…”
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Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation by Sato, Kazuo, Shikida, Mitsuhiro, Yamashiro, Takashi, Asaumi, Kazuo, Iriye, Yasuroh, Yamamoto, Masaharu

“…We evaluated orientation dependence in the etching rate of single-crystal silicon for tetramethyl-ammonium-hydroxide (TMAH) water solutions. Etching rates for…”
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Development and experimental validation of automatic conversion procedure from mechanical to electrical connection for MEMS equivalent circuit by Fujiwara, Nobuyo, Asami, Kazuo, Iriye, Yasuroh, Koike, Tomoyuki, Tsuchiya, Toshiyuki, Hashiguchi, Gen

“…This paper describes equivalent circuit for micro electromechanical system (MEMS) using a type of behavior model for expressing mechanical and…”
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Development of self-vibration/detection AFM probe using quartz tuning fork by Hida, Hirotaka, Shikida, Mitsuhiro, Fukuzawa, Kenji, Murakami, Shirou, Sato, Kenji, Asaumi, Kazuo, Iriye, Yasuroh, Sato, Kazuo

“…We present a novel type of quartz tuning‐fork probe, which oscillates and detects its own probe deformation, for atomic force microscopy (AFM) systems. The…”
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Two-dimensional device simulator venus-2D/B for amorphous silicon thin-film transistors using a gap-state model by ISHIZUKA, T, SUMINO, K, IRIYE, Y, HIROSE, M

“…A two-dimensional device simulator VENUS-2D/B for amorphous silicon thin-film transistors has been developed. For the efficient numerical simulation of…”
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Numerical and Experimental Analysis of Intermittent Line-and-Space Patterns in Thermal Nanoimprint by Onishi, Yuki, Hirai, Yoshihiko, Takagi, Hideki, Takahashi, Masaharu, Tanabe, Toshiaki, Maeda, Ryutaro, Iriye, Yasuroh

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Development and Experimental Validation of Automatic Conversion Procedure from Mechanical to Electrical Connection for MEMS Equivalent Circuit : Frontier in Sensors and Micromachines by FUJIWARA, Nobuyo, ASAMI, Kazuo, IRIYE, Yasuroh, KOIKE, Tomoyuki, TSUCHIYA, Toshiyuki, HASHIGUCHI, Gen

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Development of Self-vibration/detection AFM Probe Using Quartz Tuning fork : Frontier in Sensors and Micromachines by HIDA, Hirotaka, SHIKIDA, Mitsuhiro, FUKUZAWA, Kenji, MURAKAMI, Shirou, SATO, Kenji, ASAUMI, Kazuo, IRIYE, Yasuroh, SATO, Kazuo

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Characterization of Orientation-Dependent Etching Properties of Quartz: Application to 3-D Micromachining Simulation System by Cheng, Di, Sato, Kazuo, Shikida, Mitsuhiro, Ono, Atsushi, Sato, Kenji, Asaumi, Kazuo, Iriye, Yasuroh

“…Novel characterization results of anisotropic etching properties of single-crystal alphaquartz for a number of orientations using a spherical specimen are…”
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Development of an orientation-dependent anisotropic etching simulation system MICROCAD by Sato, Kazuo, Asaumi, Kazuo, Kobayashi, Gen, Iriye, Yasuroh, Shikida, Mitsuhiro

“…As a tool to support the fabrication process design of micromachine devices with complicated three‐dimensional (3D) configurations, a crystal…”
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Proposal of new type of micro-machined quartz tuning fork AFM probe by Hida, Hirotaka, Fukuzawa, Kenji, Cheng, Di, Sato, Kenji, Shikida, Mitsuhiro, Ono, Atsushi, Sato, Kazuo, Asaumi, Kazuo, Iriye, Yasuroh

“…A quartz probe structure with a monolithically integrated tuning fork with a sharp tip at the end has been developed for application to noncontact atomic force…”
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Fabrication and characterization of AFM probe with crystal-quartz tuning fork structure by Hida, H., Shikida, M., Fukuzawa, K., Ono, A., Sato, K., Asaumi, K., Iriye, Y., Di Cheng, Sato, K.

“…We have developed a new type of crystal quartz probe structure for application to the atomic force microscopy (AFM) system. Using quartz micromachining…”
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