Search Results - "Hubbard, T.J."
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Emergent faces in crystal etching
Published in Journal of microelectromechanical systems (01-03-1994)“…The time development of emergent faces in crystal etching is investigated. We present and discuss a novel computational approach, based on an intuitive…”
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Journal Article -
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Concave corner compensation between vertical (010)-(001) planes anisotropically etched in Si (100)
Published in Sensors and actuators. A, Physical (01-04-1998)“…This work presents a concave corner-compensation technique, to reduce substantially the residual 111 flanges between two vertical (010)-(001) planes,…”
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Journal Article Conference Proceeding -
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Elastic properties and vibration of micro-machined structures subject to residual stresses
Published in Engineering Solutions for the Next Millennium. 1999 IEEE Canadian Conference on Electrical and Computer Engineering (Cat. No.99TH8411) (1999)“…This paper presents a theoretical derivation of the changes in resonant frequencies for micro-machined beams due to residual stress. It was found that the…”
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Conference Proceeding
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Measurement of MEMS displacements and frequencies using laser interferometry
Published in Engineering Solutions for the Next Millennium. 1999 IEEE Canadian Conference on Electrical and Computer Engineering (Cat. No.99TH8411) (1999)“…This paper will present an interferometric technique for determining the displacement and vibration of micromachined beams. A modified Michelson-Morley…”
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Conference Proceeding -
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High Q resonating cantilevers for in situ measurements of ferromagnetic films
Published in 2001 Microelectromechanical Systems Conference (Cat. No. 01EX521) (2001)“…We describe micro cantilevers developed for in-situ measurements of ultra-thin ferromagnetic films. The cantilevers are optimized for use in a resonating…”
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Conference Proceeding -
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![Patterns for concave corner compensation between vertical [010]-[001] planes on Si(100) anisotropically etched in TMAH](/vufind/Cover/Show?proxy=http%3A%2F%2Fcovers-cdn.summon.serialssolutions.com%2Findex.aspx%3Fisbn%3D9780780338296%2Fmc.gif%26client%3Dsummon%26freeimage%3Dtrue)
Patterns for concave corner compensation between vertical [010]-[001] planes on Si(100) anisotropically etched in TMAH
Published in Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) (1997)“…This work presents a concave corner compensation technique, to substantially reduce the residual (111) flanges between two vertical [010]-[001] planes,…”
Get full text
Conference Proceeding