Electrode Patterning for Organic Diodes by Roll-to-Roll Processes

A roll-to-roll (R2R) photo-lithographic process using a negative dry film photo-resist was used to pattern ITO on a PET film. The roll type of PET film with patterned ITO was used as one of the electrodes for printed organic diodes fabrication. The web width of the roll-to-roll manufacturing line is...

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Bibliographic Details
Published in:	2008 Flexible Electronics and Displays Conference and Exhibition pp. 1 - 3
Main Authors:	Chih-Chiang Lu, Hsin-Lin Yuo, Chang-Yu Lin, Hou, J.
Format:	Conference Proceeding
Language:	English
Published:	IEEE 01-01-2008
Subjects:	Coatings Conductors Electrodes Fabrication flexible electronics device Indium tin oxide Manufacturing negative dry film photo-resist patterned ITO photo-lithographic polymer diodes Polymer films Positron emission tomography R2R Roll-to-roll Semiconductor diodes Thermal conductivity wet bench
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Summary:	A roll-to-roll (R2R) photo-lithographic process using a negative dry film photo-resist was used to pattern ITO on a PET film. The roll type of PET film with patterned ITO was used as one of the electrodes for printed organic diodes fabrication. The web width of the roll-to-roll manufacturing line is 250 mm and the speed can be adjusted from 1 m/min to 3 m/min. The patterned ITO electrode made by the R2R photo-lithographic process showed a feature size less than 10 mum. A polymer diode device was fabricated by coating a polymer conductor and semiconductor on the patterned ITO electrode followed by thermal evaporating a cathode electrode on the semiconductor layer. The diode DC transfer curve showed a Vt at around 0.5V and a ON/OFF ratio above 104. These results demonstrated the feasibility of using the R2R processes for fabricating organic electronics devices.
ISBN:	1424420539 9781424420537
ISSN:	1947-1939 1947-1947
DOI:	10.1109/FEDC.2008.4483872