Search Results - "Hrubišák, Fedor"
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Heteroepitaxial growth of Ga2O3 on 4H-SiC by liquid-injection MOCVD for improved thermal management of Ga2O3 power devices
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-07-2023)“…We report on the growth of monoclinic β- and orthorhombic κ-phase Ga2O3 thin films using liquid-injection metal-organic chemical vapor deposition on highly…”
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Structure and Thermal Stability of ε/κ-Ga2O3 Films Deposited by Liquid-Injection MOCVD
Published in Materials (01-01-2023)“…We report on crystal structure and thermal stability of epitaxial ε/κ-Ga2O3 thin films grown by liquid-injection metal–organic chemical vapor deposition…”
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Improved Thermal Performance of InGaAs/GaAs Nanomembrane HEMTs Transferred onto Various Substrates by Epitaxial Lift-Off
Published in ACS applied electronic materials (19-07-2024)Get full text
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Structure and Thermal Stability of ε/κ-Ga 2 O 3 Films Deposited by Liquid-Injection MOCVD
Published in Materials (20-12-2022)“…We report on crystal structure and thermal stability of epitaxial ε/κ-Ga2O3 thin films grown by liquid-injection metal−organic chemical vapor deposition…”
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Structure and Thermal Stability of ε/κ-Ga[sub.2]O[sub.3] Films Deposited by Liquid-Injection MOCVD
Published in Materials (01-12-2022)“…We report on crystal structure and thermal stability of epitaxial ε/κ-Ga[sub.2]O[sub.3] thin films grown by liquid-injection metal-organic chemical vapor…”
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Invited: Liquid-injection MOCVD-grown Ga2O3 on sapphire and 4H-SiC substrates: Material, transport, and MOSFET properties
Published in 2023 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK) (16-11-2023)“…Ga 2 O 3 is a promising ultra-wide bandgap (UWBG) semiconductor material for fabrication of high-power rectifiers and switching devices. This material,…”
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