Search Results - "Hou, Ziyang"
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Effect of hydroxy carboxylates as complexing agent on improving chemical mechanical polishing performance of M-plane sapphire and action mechanism analysis
Published in Ceramics international (15-03-2023)“…As sapphire device performance continues to improve, greater challenges are posed to the chemical mechanical polishing (CMP) of sapphire, with its high degree…”
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Hydraulic fracture characterization of debris-rich ice hole for polar geological drilling based on Peridynamics
Published in Ocean engineering (15-08-2024)“…Polar geological drilling is crucial to investigating the earth's environment and climate evolution. Hydraulic fracturing occurs around the ice holes when…”
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A universal HF‐free synthetic method to highly efficient narrow‐band red‐emitting A2XF6:Mn4+ (A = K, Na, Rb, Cs; X = Si, Ge, Ti) phosphors
Published in Journal of the American Ceramic Society (01-02-2020)“…Mn4+‐activated fluoride red‐emitting narrow‐band phosphors have been successfully used in wide color‐gamut white LEDs for liquid crystal display (LCD)…”
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4
Surface corrosion inhibition mechanism of sarcosine as a green novel inhibitor on a novel barrier layer material of cobalt in copper film CMP for GLSI
Published in Materials science in semiconductor processing (15-03-2022)“…For integrated circuits (IC), as the technology node goes down to 20-14 nm, cobalt (Co) replaces tantalum as a new barrier layer material. The polishing…”
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A universal HF‐free synthetic method to highly efficient narrow‐band red‐emitting A 2 X F 6 :Mn 4+ ( A = K, Na, Rb, Cs; X = Si, Ge, Ti) phosphors
Published in Journal of the American Ceramic Society (01-02-2020)“…Abstract Mn 4+ ‐activated fluoride red‐emitting narrow‐band phosphors have been successfully used in wide color‐gamut white LEDs for liquid crystal display…”
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6
Effect and mechanism of oxidant on alkaline chemical mechanical polishing of gallium nitride thin films
Published in Materials science in semiconductor processing (01-02-2022)“…As a wide band gap semiconductor, gallium nitride (GaN) is widely used in kinds of electronic devices. With the improvement of device accuracy, the…”
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Synergistic effect of 1,2,4-triazole and phytic acid as inhibitors on copper film CMP for ruthenium - based copper interconnected and the surface action mechanism analysis
Published in Materials science in semiconductor processing (15-03-2023)“…Ruthenium (Ru) has been selected as the next-generation barrier material for copper (Cu) interconnects due to its excellent electrical properties, high…”
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8
Investigation of the dynamic ascent characteristics of ice core during polar core drilling
Published in Cold regions science and technology (01-06-2024)“…In polar ice core drilling, continuous coring with air reverse circulation (CCARC) technique can increase the drilling rate, reduces pollution, and prevents…”
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Study on hydraulic cracking mechanism and propagation characteristics of ice hole based on Peridynamics
Published in Applied ocean research (01-10-2023)“…Drilling of polar deep ice cores is an important means to study the evolution of the earth's climate. When drilling into complex formations such as brittle ice…”
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10
Effect and mechanism analysis of sarcosine on the chemical mechanical polishing performance of copper film for GLSI
Published in Materials science in semiconductor processing (15-11-2022)“…With the decrease of integrated circuits feature size, chemical mechanical polishing (CMP) of copper (Cu) film for multilayer wiring is faced with new…”
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11
Prediction of planarization property in copper film chemical mechanical polishing via response surface methodology and convolutional neural network
Published in Nano select (01-03-2022)“…Chemical mechanical polishing (CMP) is one of the most important and effective technologies to achieve global planarization for precision machining of the…”
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12
Effect of Surfactants on CMP Properties of M-Plane Sapphire
Published in 2023 China Semiconductor Technology International Conference (CSTIC) (26-06-2023)“…M-plane sapphire is commonly used as a substrate material for gallium nitride and zinc oxide. Chemical mechanical polishing (CMP) is one of the most effective…”
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Conference Proceeding -
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Effect of Oxone and Peroxodisulphates on the Chemical Mechanical Polishing Efficiency of C-Plane GaN
Published in 2021 China Semiconductor Technology International Conference (CSTIC) (14-03-2021)“…Because of the high hardness and chemical inertia, GaN is difficult to be processed. Chemical mechanical polishing (CMP) is one of ultra-precision processing…”
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Conference Proceeding -
14
Component Optimization of Sapphire Slurry Based on Response Surface Methodology for Chemical Mechanical Polishing
Published in 2022 China Semiconductor Technology International Conference (CSTIC) (20-06-2022)“…For sapphire wafer, chemical mechanical polishing (CMP) is widely applied to obtain super-smooth and non-damaged wafer surface. To solve the problem of…”
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Conference Proceeding -
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Preparation of ZNO Doped SiO2 Abrasive and Chemical Mechanical Polishing Performance on C-Plane Sapphire Substrate
Published in 2021 China Semiconductor Technology International Conference (CSTIC) (14-03-2021)“…Sapphire substrate is the most commonly used in semiconductor industry for GaN-based light emitting diodes (LEDs). Chemical mechanical polishing (CMP) is one…”
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Conference Proceeding -
16
Effect of FA/O II Surfactant as a Complex Non-Ionic Surfactant on Copper CMP
Published in 2021 China Semiconductor Technology International Conference (CSTIC) (14-03-2021)“…The surfactant in the slurry can optimize the surface uniformity and surface topography of the wafer to realize the global planarization, so the effect of FA/O…”
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Conference Proceeding