Search Results - "Horsley, D. A."

Force-rebalanced Lorentz force magnetometer based on a micromachined oscillator by Sonmezoglu, S., Li, M., Horsley, D. A.

“…This paper presents a 3-axis Lorentz force magnetometer based on an encapsulated micromechanical silicon resonator having three orthogonal vibration modes,…”
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Waveguide piezoelectric micromachined ultrasonic transducer array for short-range pulse-echo imaging by Lu, Y., Tang, H., Wang, Q., Fung, S., Tsai, J. M., Daneman, M., Boser, B. E., Horsley, D. A.

“…This paper presents an 8 × 24 element, 100 μm-pitch, 20 MHz ultrasound imager based on a piezoelectric micromachined ultrasonic transducer (PMUT) array having…”
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Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics by Lu, Y., Tang, H., Fung, S., Wang, Q., Tsai, J. M., Daneman, M., Boser, B. E., Horsley, D. A.

“…This paper presents an ultrasonic fingerprint sensor based on a 24 × 8 array of 22 MHz piezoelectric micromachined ultrasonic transducers (PMUTs) with 100 μm…”
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Exploiting nonlinear amplitude-frequency dependence for temperature compensation in silicon micromechanical resonators by Defoort, M., Taheri-Tehrani, P., Horsley, D. A.

“…Resonators used in frequency-reference oscillators must maintain a stable frequency output even when subjected to temperature variations. The traditional…”
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Synchronization of a micromechanical oscillator in different regimes of electromechanical nonlinearity by Taheri-Tehrani, P., Defoort, M., Horsley, D. A.

“…In this letter, we investigate the dynamics of injection-locking a nonlinear micromechanical oscillator operating in different regimes of electromechanical…”
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Encapsulated high frequency (235 kHz), high-Q (100 k) disk resonator gyroscope with electrostatic parametric pump by Ahn, C. H., Nitzan, S., Ng, E. J., Hong, V. A., Yang, Y., Kimbrell, T., Horsley, D. A., Kenny, T. W.

“…In this paper, we explore the effects of electrostatic parametric amplification on a high quality factor (Q > 100 000) encapsulated disk resonator gyroscope…”
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Predicting the closed-loop stability and oscillation amplitude of nonlinear parametrically amplified oscillators by Zega, V., Nitzan, S., Li, M., Ahn, C. H., Ng, E., Hong, V., Yang, Y., Kenny, T., Corigliano, A., Horsley, D. A.

“…This work investigates the closed-loop operation of microelectromechanical oscillators in the presence of both cubic (Duffing) nonlinearities and parametric…”
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Towards picoTesla Magnetic Field Detection Using a GMR-MEMS Hybrid Device by Guedes, A., Jaramillo, G., Buffa, C., Vigevani, G., Cardoso, S., Leitao, D. C., Freitas, P. P., Horsley, D. A.

“…We are developing a novel MEMS-magnetoresistive hybrid device aimed at ultra low magnetic field detection. The hybrid device combines magnetoresistive (MR)…”
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Batch transfer of microstructures using flip-chip solder bonding by Singh, A., Horsley, D.A., Cohn, M.B., Pisano, A.P., Howe, R.T.

“…This paper describes a novel method for transfer and assembly of microstructures using sacrificial-layer micromachining and flip-chip bonding. The technique is…”
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Precision positioning using a microfabricated electrostatic actuator by Horsley, D.A., Wongkomet, N., Horowitz, R., Pisano, A.P.

“…This paper presents a microfabricated actuator designed for high precision servo-positioning in a magnetic hard disk drive. The device is actuated using…”
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Design and fabrication of an angular microactuator for magnetic disk drives by Horsley, D.A., Cohn, M.B., Singh, A., Horowitz, R., Pisano, A.P.

“…Angular electrostatic microactuators suitable for use in a two-stage servo system for magnetic disk drives have been fabricated from molded…”
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Multiplexed Fiber Bragg Grating Interrogation System Using a Microelectromechanical Fabry-Perot Tunable Filter by Allan, W.R., Graham, Z.W., Zayas, J.R., Roach, D.P., Horsley, D.A.

“…This paper describes a fiber Bragg grating strain sensor interrogation system based on a microelectromechanical systems tunable Fabry-Perot filter. The shift…”
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Assessing micromechanical sensor characteristics via optical and electrical metrology by Langfelder, G, Tocchio, A, Thompson, M J, Jaramillo, G, Horsley, D A

“…This paper presents a custom instrument for the static and dynamic electrical characterization of capacitive MEMS sensors. Such a tool is useful for the…”
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Large-Area Subwavelength Aperture Arrays Fabricated Using Nanoimprint Lithography by Skinner, J.L., Hunter, L.L., Talin, A.A., Provine, J., Horsley, D.A.

“…We report on the fabrication and characterization of large-area 2-D square arrays of subwavelength holes in Ag and Al films. Fabrication is based on thermal…”
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Tunable Subwavelength Metal Gratings in the Mid-IR Band by Provine, J., Skinner, J.L., Horsley, D.A.

“…We demonstrate a tunable infrared (IR) filter based on a patterned subwavelength grating in a metal film. The optical properties of the filter, including…”
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Optical and mechanical performance of a novel magnetically actuated MEMS-based optical switch by Horsley, D.A., Davis, W.O., Hogan, K.J., Hart, M.R., Ying, E.C., Chaparala, M., Behrang Behin, Daneman, M.J., Meng-Hsiung Kiang

“…A novel magnetically actuated 8/spl times/8-port MEMS-based fiber-optic switch is described. Fiber-to-fiber insertion loss measurements of six 8/spl times/8…”
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Epitaxially-encapsulated polysilicon disk resonator gyroscope by Nitzan, S., Ahn, C. H., Su, T.-H, Li, M., Ng, E. J., Wang, S., Yang, Z. M., O'Brien, G., Boser, B. E., Kenny, T. W., Horsley, D. A.

“…We present a 0.6 mm diameter, 20 μm thick epitaxially-sealed polysilicon disk resonator gyro (DRG). High Q (50,000) combined with electrostatic mode-matching…”
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Three-Axis Lorentz-Force Magnetic Sensor for Electronic Compass Applications by Mo Li, Rouf, V. T., Thompson, M. J., Horsley, D. A.

“…A low-power microelectromechanical-systems (MEMS) three-axis Lorentz-force magnetic sensor is presented. The sensor detects magnetic field in two axes with a…”
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Quadrature FM gyroscope by Kline, M. H., Yeh, Y., Eminoglu, B., Najar, H., Daneman, M., Horsley, D. A., Boser, B. E.

“…A dual mass vibratory gyroscope sensor demonstrates the quadrature frequency modulated (QFM) operating mode, where the frequency of the circular orbit of a…”
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Low power 3-axis Lorentz force navigation magnetometer by Thompson, M J, Li, M, Horsley, D A

“…Demonstrated here is a MEMS magnetometer fabricated with the ST Microelectronics THELMA process that uses a single MEMS structure to detect magnetic flux in…”
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