Search Results - "Hetzer, Dave"

Material and process improvements towards sub 36nm pitch EUV single exposure by Petrillo, Karen, Murray, Cody, Meli, Luciana, Hubbard, Alex, Sharma, Saumya, De Silva, Anuja, Huli, Lior, Shibata, Naoki, Lemley, Corey, Hetzer, Dave, Shimoaoki, Takashi, Hashimoto, Yusaku, Tanaka, Kouichirou, Kawakami, Shinichiro

“…With the insertion of EUV lithography into high volume manufacturing, mature lithographic materials and processes are required on multiple fronts. Not only do…”
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Integrated ODP metrology as an APC enabler for complex high aspect ratio 3D deep trench device structures by Schmidt, B., Reinig, P., Komarov, S., Hetzer, D., Likhachev, D., Funk, M.

“…The current technology node and the complexity of device design and processing demand metrology systems that can provide profile and underlying layer…”
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Hot melt ink technology for crystalline silicon solar cells by Williams, T., McVicker, K., Shaikh, A., Koval, T., Shea, S., Kinsey, B., Hetzer, D.

“…This paper presents a new thick film system for forming front and rear contacts on crystalline solar cells; the aim is to improve manufacturing throughput,…”
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