Search Results - "Helg, Andreas G."

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    Microlithography by Using Neutral Metastable Atoms and Self-Assembled Monolayers by Berggren, Karl K., Bard, Andreas, Wilbur, James L., Gillaspy, John D., Helg, Andreas G., McClelland, Jabez J., Rolston, Steven L., Phillips, William D., Prentiss, Mara, Whitesides, George M.

    “…Lithography can be performed with beams of neutral atoms in metastable excited states to pattern self-assembled monolayers (SAMs) of alkanethiolates on gold…”
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    Journal Article