Search Results - "Haynes, T.E."
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Hall effect and Raman analysis of residual damage and free electron concentration in Si-implanted GaAs: a quest for better doping efficiency
Published in The Journal of physics and chemistry of solids (01-07-2005)“…To tackle the problem of insufficient electrical activation of Si + dopant in GaAs, we have studied a series of heavily Si-implanted and thermally annealed…”
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2
Oriented, single domain Fe nanoparticle layers in single crystal yttria-stabilized zirconia
Published in IEEE transactions on magnetics (01-07-2001)“…To create an ensemble of oriented, single crystal particles of iron, Fe ions were implanted into the near-surface region of single crystal yttria-stabilized…”
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3
The metabolic basis of arginine nutrition and pharmacotherapy
Published in Biomedicine & pharmacotherapy (01-11-2002)“…As an essential precursor for the synthesis of proteins and other molecules with enormous biological importance (including nitric oxide, urea, ornithine,…”
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4
Efficient production of silicon-on-insulator films by co-implantation of He+ with H
Published in Applied physics letters (02-03-1998)“…We have investigated the process of thin film separation by gas ion implantation and wafer bonding, as well as the more basic phenomenon of blistering, on…”
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5
Mechanism of silicon exfoliation induced by hydrogen/helium co-implantation
Published in Applied physics letters (21-12-1998)“…Infrared spectroscopy and secondary ion mass spectrometry are used to elucidate the mechanism by which co-implantation of He with H facilitates the shearing of…”
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6
Mechanism for the reduction of interstitial supersaturations in MeV-implanted silicon
Published in Applied physics letters (01-03-1999)“…We demonstrate that the excess vacancies induced by a 1 MeV Si implant reduce the excess interstitials generated by a 40 keV Si implant during thermal…”
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7
Depth profiling of vacancy clusters in MeV-implanted Si using Au labeling
Published in Applied physics letters (16-11-1998)“…A technique for profiling the clustered-vacancy region produced by high-energy ion implantation into silicon is described and tested. This technique takes…”
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8
Boron-enhanced diffusion of boron from ultralow-energy ion implantation
Published in Applied physics letters (26-04-1999)“…We have investigated the diffusion enhancement mechanism of boron-enhanced diffusion (BED), wherein boron diffusivity is enhanced four to five times over the…”
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9
Reduction of transient diffusion from 1–5 keV Si+ ion implantation due to surface annihilation of interstitials
Published in Applied physics letters (24-11-1997)“…The reduction of transient enhanced diffusion (TED) with reduced implantation energy has been investigated and quantified. A fixed dose of 1×1014 cm−2 Si+ was…”
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10
Interactions of ion-implantation-induced interstitials with boron at high concentrations in silicon
Published in Applied physics letters (02-09-1996)“…Ion implantation of Si (60 keV, 1×1014/cm2) has been used to introduce excess interstitials into silicon predoped with high background concentrations of B,…”
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11
Switchable reflectivity on silicon from a composite VO{sub 2}-SiO{sub 2} protecting layer
Published in Applied physics letters (23-08-2004)“…Surfaces whose reflectivity can be thermally controlled were formed on single crystals of silicon by using ion beams to create a nanocomposite layer consisting…”
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12
The interstitial fraction of diffusivity of common dopants in Si
Published in Applied physics letters (29-12-1997)“…The relative contributions of interstitials and vacancies to diffusion of a dopant A in silicon are specified by the interstitial fraction of diffusivity, fA…”
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13
Damage saturation during high-energy ion implantation of Si[sub 1[minus][ital x]]Ge[sub [ital x]]
Published in Applied physics letters (28-12-1992)“…Saturation of radiation damage during MeV Si[sup +]-ion implantation of unstrained Si[sub 1[minus][ital x]]Ge[sub [ital x]] ([ital x]=0.15,0.50) alloy layers,…”
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14
Interstitial defects in silicon from 1–5 keV Si+ ion implantation
Published in Applied physics letters (23-06-1997)“…Extended defects from 5-, 2-, and 1-keV Si+ ion implantation are investigated by transmission electron microscopy using implantation doses of 1 and 3×1014 cm−2…”
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15
Damage accumulation during ion implantation of unstrained Si sub 1 minus x Ge sub x alloy layers
Published in Applied physics letters (06-07-1992)“…The growth of damage induced by ion implantation in unstrained Si{sub 1{minus}x}Ge{sub x} epilayers is examined as a function of epilayer composition and of…”
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16
Use of x-ray microbeams for cross-section depth profiling of MeV ion-implantation-induced defect clusters in Si
Published in Applied physics letters (01-11-1999)“…We have used submicron-resolution synchrotron x-ray beams to study the size, type, and depth distribution of ion-implantation-induced defect clusters in Si. A…”
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17
Transient enhanced diffusion of Sb and B due to MeV silicon implants
Published in Applied physics letters (16-06-1997)“…We measure the transient enhanced diffusion of shallow molecular-beam-epitaxy grown marker layers of Sb and B due to deep MeV Si+ ion implants at very high…”
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18
Implant damage and transient enhanced diffusion in Si
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01-12-1995)“…Transmission electron microscopy is used to address two key questions for ion-implant technology in Si. First, how does ion damage influence the diffusion of…”
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19
Dose rate effects on damage accumulation in Si sup + -implanted gallium arsenide
Published in Applied physics letters (07-01-1991)“…Ion-induced damage accumulation has been measured as a function of ion dose and dose rate following 100 keV Si{sup +} room-temperature implants in GaAs. The…”
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Journal Article -
20
Transient enhanced diffusion from decaborane molecular ion implantation
Published in Applied physics letters (05-10-1998)“…Transient enhanced diffusion (TED) from implantation of 5 keV B10H14 and 0.5 keV B ions has been quantified and compared for nominal boron doses of 1014 and…”
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