Plasma characteristics in Ne/Xe/HCl gas mixtures: A parametric study

An important class of exciplex molecules consists of rare gas halides (RgH) such as the monochloride of xenon (XeCl). This excimer emits photons with energies of about eV at wavelength of 308 nm. The present work examines the effects of external circuit parameters and total gas pressure on the chara...

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Bibliographic Details
Published in:	Materials today : proceedings Vol. 49; pp. 970 - 975
Main Authors:	Harrache, Zahir, Amir Aid, Driss, Harrache, Yazid, Belasri, Ahmed
Format:	Journal Article
Language:	English
Published:	Elsevier Ltd 2022
Subjects:	Excimer molecule External circuit Plasma Total gas pressure Plasma External circuit Total gas pressure Excimer molecule
Online Access:	Get full text
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Summary:	An important class of exciplex molecules consists of rare gas halides (RgH) such as the monochloride of xenon (XeCl). This excimer emits photons with energies of about eV at wavelength of 308 nm. The present work examines the effects of external circuit parameters and total gas pressure on the characteristic properties of excimer discharge plasma in Ne/Xe/HCl gas mixture. The numerical investigation is carried using a zero-dimensional model, in which the electric circuit, the kinetic processes in the active medium, and the electron Boltzmann equation are considered. We find that increasing values of capacitance, inductance, charging voltage, and gas pressure affects significantly the discharge plasma behavior.
ISSN:	2214-7853 2214-7853
DOI:	10.1016/j.matpr.2021.08.101