Effect of substrate on the characteristics of the interface between diamond film and substrate
Diamond films were deposited on Si and Mo substrates by a microwave plasma-enhanced chemical vapor deposition method. The morphology and the chemical composition of the interfacial layer were investigated on the film side and the substrate side surfaces. In the Si substrate case, we found an island...
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Published in: | Diamond and related materials Vol. 6; no. 8; pp. 959 - 963 |
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Main Authors: | , , , , , |
Format: | Journal Article |
Language: | English |
Published: |
Amsterdam
Elsevier B.V
01-05-1997
Elsevier |
Subjects: | |
Online Access: | Get full text |
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Summary: | Diamond films were deposited on Si and Mo substrates by a microwave plasma-enhanced chemical vapor deposition method. The morphology and the chemical composition of the interfacial layer were investigated on the film side and the substrate side surfaces. In the Si substrate case, we found an island shape which could involve a rough surface as well as glassy carbon areas. On the contrary, in the Mo substrate case, no such island could be observed, and the film side detached from the Mo substrate presented a much smoother surface. From these results, we suggested the model for the initial step of diamond deposition in cases of Si and Mo substrates. |
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ISSN: | 0925-9635 1879-0062 |
DOI: | 10.1016/S0925-9635(96)00774-1 |