Search Results - "Hackley, J C"

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  1. 1
    Properties of atomic layer deposited HfO(2) thin films

    Properties of atomic layer deposited HfO(2) thin films by Hackley, J C, Gougousi, T

    Published in Thin solid films (30-10-2009)
    “…The growth, composition and morphology of HfO(2) films that have been deposited by atomic layer deposition (ALD) are examined in this article. The films are…”
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  2. 2
    Learning with video

    Learning with video by Baughman, D, Hackley, J C

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