Search Results - "HONDA, TOSHIFUMI"

Classification and Size Estimation of Wafer Defects by Using Scattered Light Distribution by SUGIHARA, YOSHIHIKO, HONDA, TOSHIFUMI, URANO, YUTA, WATANABE, MASAHIRO, NOGUCHI, SO, IGARASHI, HAJIME

“…SUMMARY Usually, wafer inspection is a two‐step process. The first step, which is very important, consists of detection of defects on the wafer. The second…”
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Model-based defect detection in multidimensional vector spaces by Honda, Toshifumi, Obara, Kenji, Harada, Minoru, Igarashi, Hajime

“…222222222222222A highly sensitive inspection algorithm is proposed that extracts defects in multidimensional vector spaces from multiple images. The proposed…”
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Development of pupil divided optics with magnification correction for high NA oblique imaging by Arima, Eiji, Urano, Yuta, Honda, Toshifumi, Matsumoto, Shunichi

“…For manufacturing semiconductor devices and hard disks, a high sensitivity and high throughput inspection system is required to detect defects on the surface…”
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A fast iterative technique for restoring scanning electron microscope images by Nakahira, Kenji, Miyamoto, Atsushi, Honda, Toshifumi

“…This paper proposes a fast new technique for restoring scanning electron microscope images to improve their sharpness. The images with our approach are…”
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Enhanced Scattered Light Imaging of Nanoparticles by Controlling the Polarization Distribution with Photonic Crystals by Otani, Yuko, Urano, Yuta, Honda, Toshifumi, Watanabe, Masahiro

“…An optical microscopy with a high sensitivity and resolution is required for observing semiconductor wafers and biological cells for nanotechnology and…”
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