Search Results - "HONDA, MASANOBU"
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Si Damage Due to Oblique-Angle Ion Impact Relevant for Vertical Gate Etching Processes
Published in Japanese Journal of Applied Physics (01-08-2012)“…In reactive ion etching (RIE) processes of vertical metal oxide semiconductor (MOS) devices, damages caused by ion bombardment at oblique incidence may affect…”
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Novel technology of high-aspect-ratio etch utilizing coverage-controllable atomic layer deposition
Published in Japanese Journal of Applied Physics (01-07-2022)“…We demonstrated a coverage-controllable sidewall protective film by controlling the degree of oxidation during plasma-enhanced SiO 2 atomic layer deposition…”
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A method for high selective etch of Si3N4 and SiC with ion modification and chemical removal
Published in Japanese Journal of Applied Physics (01-06-2019)“…We demonstrated a high selective and anisotropic plasma etch of silicon nitride (Si3N4) and silicon carbide (SiC). The demonstrated process consists of a…”
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Precise and practical 3D topography simulation of high aspect ratio contact hole etch by using model optimization algorithm
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-07-2024)“…High Aspect Ratio Contact (HARC) hole etch is one of the most challenging processes that require many efforts to optimize etch condition. As the aspect ratio…”
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5
Si Damage Due to Oblique-Angle Ion Impact Relevant for Vertical Gate Etching Processes
Published in Japanese Journal of Applied Physics (01-08-2012)Get full text
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A method for high selective etch of Si 3 N 4 and SiC with ion modification and chemical removal
Published in Japanese Journal of Applied Physics (01-06-2019)Get full text
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Beyond 10 μm Depth Ultra-High Speed Etch Process with 84% Lower Carbon Footprint for Memory Channel Hole of 3D NAND Flash over 400 Layers
Published in 2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) (11-06-2023)“…A novel High-Aspect-Ratio (HAR) dielectric etch technology which is capable of etching beyond 10 \mu \mathrm{m} depth memory channel hole for future…”
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Conference Proceeding -
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Benefit of precise control of surface reaction by new patterning technique for small-contact etching with TiN hard mask
Published in Japanese Journal of Applied Physics (01-06-2017)“…We introduce state-of-the art small-contact etching by a new patterning technique using atomic layer etching (ALE) for sub-5 nm technology generation. In…”
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9
Mechanical Demagnetization at Head Disk Interface of Perpendicular Recording
Published in IEEE transactions on magnetics (01-02-2009)“…We investigated the mechanism of nanometer-depth scratches triggering adjacent track interference (ATI) by applying DC erasure magnetic fields to scratch areas…”
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Journal Article Conference Proceeding -
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New innovative etch technologies utilizing state-of-the-art atomic-level process for advanced patterning
Published in 2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (06-03-2022)“…In leading-edge semiconductor fabrications, atomic order controlled process such as Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALE) are partly…”
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Conference Proceeding -
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Interventional placement of thin coil shaped implants powered wirelessly for monitoring vital signals and controlling abnormal activities by electro-stimulation
Published in 2016 38th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC) (01-08-2016)“…Various types of implants are being commonly used for monitoring vital signals and controlling the critically ill patient's condition such as arrhythmia, sick…”
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Conference Proceeding Journal Article -
12
Effects of low magnesium diet on the vascular prostaglandin and fatty acid metabolism in rats
Published in Prostaglandins (01-10-1988)“…Deficiency of magnesium with cardiovascular effects is thought to be related to alterations in the biosynthesis of prostaglandins (PGs) in the vasculature…”
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13
Effects of ACTH on Plasma Levels of Adrenal Steroids in Essential Hypertension
Published in Endocrinologia Japonica (01-01-1976)“…Plasma concentrations of progesterone (P), deoxycorticosterone (DOC), 17-hydroxyprogesterone (17-OH P), corticosterone (B), deoxycortisol (S), cortisol (F) and…”
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The Simultaneous Assay of Progesterone, 17-Hydroxyprogesterone, and Deoxycorticosterone in Human Plasma by Competitive Protein Binding
Published in Endocrinologia Japonica (01-01-1976)“…A method is described for the simultaneous measurement of prosterone (P), 17-hydroxyprogesterone (17-OHP) and deoxycorticosterone (DOC) in plasma by…”
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15
Effects of α-human atrial natriuretic peptide on plasma steroids and renal function in human
Published in The Japanese Journal of Nephrology (25-02-1987)“…The effects of α-human atrial natriuretic peptide (α-hANP) on cortisol (F) and aldosterone (Aid) productions were investigated in 6 patients with essential…”
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Effects of aldosterone and adrenocorticotropic hormone on urinary kallikrein excretion
Published in Nihon Jinzo Gakkai shi (1986)Get more information
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Effects of angiotensin II and angiotensin III on prostacyclin release in man
Published in Nihon Jinzo Gakkai shi (1983)Get more information
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Influence of Food on the Clinical Effect of Angiotensin I Converting Enzyme Inhibitor (SQ 14, 225)
Published in The Tohoku Journal of Experimental Medicine (01-01-1983)“…IZUMI, Y., HONDA, M., HATANO, M. and KAWAHARA, Y. Influence of Food on the Clinical Effect of Angiotensin I Converting Enzyme Inhibitor (SQ 14, 225). Tohoku J…”
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20
Wireless temperature and illuminance sensor nodes with energy harvesting from insulating cover of power cords for building energy management system
Published in 2015 IEEE PES Asia-Pacific Power and Energy Engineering Conference (APPEEC) (01-11-2015)“…A new energy harvesting with low installation cost is proposed to enable stable power supply to battery-less wireless sensor nodes for energy management…”
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Conference Proceeding