Search Results - "HONDA, MASANOBU"

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  1. 1

    Si Damage Due to Oblique-Angle Ion Impact Relevant for Vertical Gate Etching Processes by Ito, Tomoko, Karahashi, Kazuhiro, Mizotani, Kohei, Isobe, Michiro, Kang, Song-Yun, Honda, Masanobu, Hamaguchi, Satoshi

    Published in Japanese Journal of Applied Physics (01-08-2012)
    “…In reactive ion etching (RIE) processes of vertical metal oxide semiconductor (MOS) devices, damages caused by ion bombardment at oblique incidence may affect…”
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    Journal Article
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    Novel technology of high-aspect-ratio etch utilizing coverage-controllable atomic layer deposition by Kumakura, Sho, Sasagawa, Hironari, Nishizuka, Tetsuya, Kihara, Yoshihide, Honda, Masanobu

    Published in Japanese Journal of Applied Physics (01-07-2022)
    “…We demonstrated a coverage-controllable sidewall protective film by controlling the degree of oxidation during plasma-enhanced SiO 2 atomic layer deposition…”
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    Journal Article
  3. 3

    A method for high selective etch of Si3N4 and SiC with ion modification and chemical removal by Kumakura, Sho, Tabata, Masahiro, Honda, Masanobu

    Published in Japanese Journal of Applied Physics (01-06-2019)
    “…We demonstrated a high selective and anisotropic plasma etch of silicon nitride (Si3N4) and silicon carbide (SiC). The demonstrated process consists of a…”
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    Journal Article
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    Precise and practical 3D topography simulation of high aspect ratio contact hole etch by using model optimization algorithm by Nishizuka, Tetsuya, Igosawa, Ryo, Yokoyama, Takahiro, Sako, Kaoru, Moki, Hironori, Honda, Masanobu

    “…High Aspect Ratio Contact (HARC) hole etch is one of the most challenging processes that require many efforts to optimize etch condition. As the aspect ratio…”
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    Journal Article
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    Beyond 10 μm Depth Ultra-High Speed Etch Process with 84% Lower Carbon Footprint for Memory Channel Hole of 3D NAND Flash over 400 Layers by Kihara, Yoshihide, Tomura, Maju, Sakamoto, Wataru, Honda, Masanobu, Kojima, Masayuki

    “…A novel High-Aspect-Ratio (HAR) dielectric etch technology which is capable of etching beyond 10 \mu \mathrm{m} depth memory channel hole for future…”
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    Conference Proceeding
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    Benefit of precise control of surface reaction by new patterning technique for small-contact etching with TiN hard mask by Tabata, Masahiro, Tsuji, Akihiro, Katsunuma, Takayuki, Honda, Masanobu

    Published in Japanese Journal of Applied Physics (01-06-2017)
    “…We introduce state-of-the art small-contact etching by a new patterning technique using atomic layer etching (ALE) for sub-5 nm technology generation. In…”
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    Journal Article
  9. 9

    Mechanical Demagnetization at Head Disk Interface of Perpendicular Recording by Junguo Xu, Furukawa, M., Nakamura, A., Honda, M.

    Published in IEEE transactions on magnetics (01-02-2009)
    “…We investigated the mechanism of nanometer-depth scratches triggering adjacent track interference (ATI) by applying DC erasure magnetic fields to scratch areas…”
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    Journal Article Conference Proceeding
  10. 10

    New innovative etch technologies utilizing state-of-the-art atomic-level process for advanced patterning by Kumakura, Sho, Katsunuma, Takayuki, Nishizuka, Tetsuya, Kihara, Yoshihide, Honda, Masanobu

    “…In leading-edge semiconductor fabrications, atomic order controlled process such as Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALE) are partly…”
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    Conference Proceeding
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    Interventional placement of thin coil shaped implants powered wirelessly for monitoring vital signals and controlling abnormal activities by electro-stimulation by Ohta, Hidetoshi, Honda, Masanobu, Takamiya, Makoto

    “…Various types of implants are being commonly used for monitoring vital signals and controlling the critically ill patient's condition such as arrhythmia, sick…”
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    Conference Proceeding Journal Article
  12. 12

    Effects of low magnesium diet on the vascular prostaglandin and fatty acid metabolism in rats by Soma, M, Cunnane, S C, Horrobin, D F, Manku, M S, Honda, M, Hatano, M

    Published in Prostaglandins (01-10-1988)
    “…Deficiency of magnesium with cardiovascular effects is thought to be related to alterations in the biosynthesis of prostaglandins (PGs) in the vasculature…”
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    Journal Article
  13. 13

    Effects of ACTH on Plasma Levels of Adrenal Steroids in Essential Hypertension by HONDA, MASANOBU

    Published in Endocrinologia Japonica (01-01-1976)
    “…Plasma concentrations of progesterone (P), deoxycorticosterone (DOC), 17-hydroxyprogesterone (17-OH P), corticosterone (B), deoxycortisol (S), cortisol (F) and…”
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    Journal Article
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    The Simultaneous Assay of Progesterone, 17-Hydroxyprogesterone, and Deoxycorticosterone in Human Plasma by Competitive Protein Binding by HONDA, MASANOBU

    Published in Endocrinologia Japonica (01-01-1976)
    “…A method is described for the simultaneous measurement of prosterone (P), 17-hydroxyprogesterone (17-OHP) and deoxycorticosterone (DOC) in plasma by…”
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    Journal Article
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    Effects of α-human atrial natriuretic peptide on plasma steroids and renal function in human by WATANABE, MASASHI, HONDA, MASANOBU, HATANO, MICHINOBU

    Published in The Japanese Journal of Nephrology (25-02-1987)
    “…The effects of α-human atrial natriuretic peptide (α-hANP) on cortisol (F) and aldosterone (Aid) productions were investigated in 6 patients with essential…”
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    Journal Article
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    Influence of Food on the Clinical Effect of Angiotensin I Converting Enzyme Inhibitor (SQ 14, 225) by IZUMI, YOICHI, HONDA, MASANOBU, HATANO, MICHINOBU, KAWAHARA, YUKINORI

    “…IZUMI, Y., HONDA, M., HATANO, M. and KAWAHARA, Y. Influence of Food on the Clinical Effect of Angiotensin I Converting Enzyme Inhibitor (SQ 14, 225). Tohoku J…”
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    Journal Article
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    Wireless temperature and illuminance sensor nodes with energy harvesting from insulating cover of power cords for building energy management system by Honda, Masanobu, Sakurai, Takayasu, Takamiya, Makoto

    “…A new energy harvesting with low installation cost is proposed to enable stable power supply to battery-less wireless sensor nodes for energy management…”
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    Conference Proceeding