Search Results - "HARRIOTT, L. R"
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The electrical behavior of nitro oligo(phenylene ethynylene)'s in pure and mixed monolayers
Published in Journal of electronic materials (2006)“…In order to realize molecular electronic devices, molecules with electrically interesting behavior must be identified. One molecule that has potential for use…”
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Journal Article -
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Limits of lithography
Published in Proceedings of the IEEE (01-03-2001)“…Lithography technology has been one of the key enablers and drivers for the semiconductor industry for the past several decades. Improvements in lithography…”
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Kinetic surface roughening in molecular beam epitaxy of InP
Published in Physical review letters (28-06-1993)Get full text
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High-resolution patterning of high Tc superconductors
Published in Applied physics letters (31-07-1989)“…A 20 keV Ga focused ion beam has been used to pattern superconducting submicrometer bridge structures in thin films of Ba2YCu3O7 material by physical…”
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Ultrathin semiconductor layer masks for high vacuum focused Ga ion beam lithography
Published in Applied physics letters (02-05-1988)“…The application of thin semiconductor layers as etch masks for high vacuum lithography is described. Heteroepitaxial layers of In0.53Ga0.47As or InP, as thin…”
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Nanowell device for the electrical characterization of metal–molecule–metal junctions
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-07-2005)“…A nanowell device for the electrical characterization of metal–molecule–metal junctions was built using readily available processing tools and techniques. This…”
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Scanning force microscopy measurement of edge growth rate enhancement in selective area epitaxy
Published in Applied physics letters (1993)“…Using scanning force microscopy we have studied the growth rate enhancement at the edge of InP and lattice matched InGaAs layers grown into openings on…”
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In situ pattern formation and high quality overgrowth by gas source molecular beam epitaxy
Published in Applied physics letters (10-04-1989)Get full text
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Micromachining of integrated optical structures
Published in Applied physics letters (23-06-1986)“…Three-dimensional features have been milled into optical materials by scanning a submicron focused gallium ion beam. Different shapes are obtained using…”
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Buried-heterostructure lasers fabricated by in situ processing techniques
Published in Applied physics letters (29-10-1990)“…We describe, for the first time, the preparation of InGaAs/InP homojunction confined buried-heterostructure lasers by high vacuum processing techniques…”
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Beam‐size measurements in focused ion beam systems
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-03-1990)“…Accurate measurement of the beam diameter for a finely focused ion beam is difficult using conventional methods which have been applied in electron beam…”
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Study of the room temperature molecular memory observed from a nanowell device
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-07-2005)“…We tested the electrical characteristics of an oligo(phenylene ethynylene) (OPE) molecule with one nitro side group, an OPE with two nitro side groups, and an…”
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Electron-optics method for high-throughput in a SCALPEL system: Preliminary analysis
Published in Microelectronic engineering (01-03-1998)“…A likely technology to supplant optical tools for the manufacturing of sub-0.13 μm design rule ICs is one based upon SCALPEL ® (SCattering with Angular…”
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Journal Article Conference Proceeding -
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Kinetic roughness in epitaxy (experimental)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (01-03-1995)“…Different regimes of growth morphology are observed for InP films prepared by metal-organic molecular beam epitaxy. Below a well-defined minimum growth…”
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Journal Article Conference Proceeding -
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Feature size effects on selective area epitaxy of InGaAs
Published in Applied physics letters (19-10-1992)“…We demonstrate the use of an ultrathin (≊5 nm) Si layer deposited on InP substrates as a mask in selective area epitaxy of InGaAs by metalorganic molecular…”
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Digital scan model for focused ion beam induced gas etching
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-11-1993)“…Focused ion beam (FIB), assisted, gas etching has several advantages over physical sputtering in many FIB applications. Advantages include etch rate…”
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Defect repair for soft x‐ray projection lithography masks
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-11-1992)“…The most promising option for masks intended for use in soft x‐ray projection lithography (SXPL) at λ=13 nm is a reflective mask which uses a Mo/Si multilayer…”
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Conference Proceeding -
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Focused ion beam XeF2 etching of materials for phase‐shift masks
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-11-1993)“…Phase‐shift masks (PSMs) for photolithography are emerging as a very important technology for integrated circuit manufacture at 0.35 μm design rules and below…”
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Conference Proceeding -
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Decomposition of palladium acetate films with a microfocused ion beam
Published in Applied physics letters (15-12-1986)“…Submicron Pd features have been fabricated on Si and SiO2 substrates by microfocused Ga+ ion beam exposure of spin-on palladium acetate, [Pd(O2CCH3)2]3, films…”
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