Search Results - "Gwang Jeong, Yu"

Reactive ion etching of indium gallium zinc oxide (IGZO) and chamber cleaning using low global warming potential gas by Woo Hong, Jong, Woo Tak, Hyun, Il Cho, Nam, Joon Eoh, Hyeong, Ho Kim, Chan, Won Jeong, Jun, Lim Kim, Kyung, Jin Yoo, Hee, Min Cho, Hyun, Gwang Jeong, Yu, Woon Jung, Da, Jong Yeo, Yun, Young Yeom, Geun, Woo Kim, Dong

“…[Display omitted] •When etching IGZO with CxHyFz/Ar, compared to CxFy/Ar and CxHy/Ar gases, the selectivity of PR and etching rate also increased.•As the gases…”
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Indium tin oxide etch characteristics using CxH2x+2(x=1,2,3)/Ar by Hong, Jong Woo, Cho, Hyun Min, Jeong, Yu Gwang, Jung, Da Woon, Yeo, Yun Jong, Kang, Ji Eun, Kim, Hee Ju, Tak, Hyun Woo, Yeom, Geun Young, Kim, Dong Woo

“…For the next generation display devices, dry etching technique for indium tin oxide (ITO) used as a transparent electrode is required to obtain a highly…”
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33.3: A 14.1-Inch WXGA+ LCD Panel Using Hybrid Silicon Thin Film Transistors by Cho, Sung Haeng, Choi, Yong Mo, Jeong, Yu Gwang, Kim, Hyungjun, Song, Jun Ho, Jeong, Chang-Oh, Kim, Shi Yul, Kim, Sang Soo

“…A hybrid silicon technology (HyST) thin film transistor (TFT) process using a diode‐pumped solid state (DPSS) laser has been developed by implementing…”
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Development of a new hybrid silicon thin-film transistor fabrication process by Cho, Sung Haeng, Choi, Yong Mo, Kim, Hyungjun, Jeong, Yu Gwang, Jeong, Chang-Oh, Kim, Shi Yul

“…A new hybrid silicon thin-film transistor (TFT) fabrication process using the DPSS laser crystallization technique was developed in this study to realize…”
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