Search Results - "Guillorn, Michael"

Two-Dimensional Pattern Formation Using Graphoepitaxy of PS‑b‑PMMA Block Copolymers for Advanced FinFET Device and Circuit Fabrication by Tsai, Hsinyu, Pitera, Jed W, Miyazoe, Hiroyuki, Bangsaruntip, Sarunya, Engelmann, Sebastian U, Liu, Chi-Chun, Cheng, Joy Y, Bucchignano, James J, Klaus, David P, Joseph, Eric A, Sanders, Daniel P, Colburn, Matthew E, Guillorn, Michael A

“…Directed self-assembly (DSA) of lamellar phase block-co-polymers (BCPs) can be used to form nanoscale line-space patterns. However, exploiting the potential of…”
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Dopant-Segregation Technique for Leakage Reduction and Performance Improvement in Trigate Transistors Without Raised Source/Drain Epitaxy by Fei Liu, Zhen Zhang, Khater, Marwan H., Yu Zhu, Koswatta, Siyuranga O., Chang, Josephine, Gonsalves, Jemima, Price, William, Engelmann, Sebastian U., Guillorn, Michael A.

“…A dopant-segregation technique for junction engineering has been demonstrated on trigate transistors using a process flow that does not include raised…”
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Ultra Low Contact Resistivities for CMOS Beyond 10-nm Node by Zhen Zhang, Koswatta, S. O., Bedell, S. W., Baraskar, A., Guillorn, M., Engelmann, S. U., Yu Zhu, Gonsalves, J., Pyzyna, A., Hopstaken, M., Witt, C., Li Yang, Fei Liu, Newbury, J., Wei Song, Cabral, C., Lofaro, M., Ozcan, A. S., Raymond, M., Lavoie, C., Sleight, J. W., Rodbell, K. P., Solomon, P. M.

“…Contact resistances are directly measured for contacts with sizes from 25 to 330 nm using e-beam based nano-TLM devices. Record low contact resistivities ~1.5…”
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Transition between 'base' and 'tip' carbon nanofiber growth modes by MELECHKO, Anatoli V, MERKULOV, Vladimir I, LOWNDES, Douglas H, GUILLORN, Michael A, SIMPSON, Michael L

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Effects of ultraviolet and vacuum ultraviolet synchrotron radiation on organic underlayers to modulate line-edge roughness of fine-pitch poly-silicon patterns by Miyazoe, Hiroyuki, Engelmann, Sebastian U., Guillorn, Michael A., Pei, Dongfei, Li, Weiyi, Lauer, Jason L., Leon Shohet, J., Fuller, Nicholas C. M.

“…Deformation of the pattern or the increase in line roughness during plasma etching becomes more significant with the shrink of complementary…”
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Microarrays of Vertically-Aligned Carbon Nanofiber Electrodes in an Open Fluidic Channel by McKnight, Timothy E, Melechko, Anatoli V, Austin, Derek W, Sims, Tyler, Guillorn, Michael A, Simpson, Michael L

“…Fabrication and electrochemical characterization of microarrays of individually addressable vertically aligned carbon nanofiber electrodes contained within an…”
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Alignment mechanism of carbon nanofibers produced by plasma-enhanced chemical-vapor deposition by Merkulov, Vladimir I., Melechko, Anatoli V., Guillorn, Michael A., Lowndes, Douglas H., Simpson, Michael L.

“…We report experimental evidence showing a direct correlation between the alignment of carbon nanofibers (CNFs) prepared by plasma-enhanced chemical-vapor…”
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In situ electric-field-induced contrast imaging of electronic transport pathways in nanotube-polymer composites by Jesse, Stephen, Guillorn, Michael A., Ivanov, Ilia N., Puretzky, Alexander A., Howe, Jane Y., Britt, Phillip F., Geohegan, David B.

“…An electric-field-induced contrast mechanism for scanning electron microscopy is reported which permits the visualization of embedded nanomaterials inside…”
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Shaping carbon nanostructures by controlling the synthesis process by Merkulov, Vladimir I., Guillorn, Michael A., Lowndes, Douglas H., Simpson, Michael L., Voelkl, Edgar

“…The ability to control the nanoscale shape of nanostructures in a large-scale synthesis process is an essential and elusive goal of nanotechnology research…”
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Fabrication and Characterization of Carbon Nanofiber-Based Vertically Integrated Schottky Barrier Junction Diodes by Yang, Xiaojing, Guillorn, Michael A, Austin, Derek, Melechko, Anatoli V, Cui, Hongtao, Meyer, Harry M, Merkulov, Vladimir I, Caughman, J. B. O, Lowndes, Douglas H, Simpson, Michael L

“…We report on the fabrication and electrical characterization of active nanoscale electronic devices using single vertically aligned carbon nanofibers (VACNFs)…”
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Sharpening of carbon nanocone tips during plasma-enhanced chemical vapor growth by Merkulov, Vladimir I, Melechko, Anatoli V, Guillorn, Michael A, Lowndes, Douglas H, Simpson, Michael L

“…In situ tip sharpening of vertically aligned carbon nanocones (VACNCs) was demonstrated. VACNCs were synthesized on patterned catalyst dots of 100 nm in…”
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Four-probe charge transport measurements on individual vertically aligned carbon nanofibers by Zhang, Lan, Austin, Derek, Merkulov, Vladimir I., Meleshko, Anatoli V., Klein, Kate L., Guillorn, Michael A., Lowndes, Douglas H., Simpson, Michael L.

“…We report four-probe I–V measurements on individual vertically aligned carbon nanofibers (VACNFs). These measurements were enabled by the fabrication of…”
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Effects of Microfabrication Processing on the Electrochemistry of Carbon Nanofiber Electrodes by McKnight, Timothy E, Melechko, Anatoli V, Guillorn, Michael A, Merkulov, Vladimir I, Doktycz, Mitchel J, Culbertson, Christopher T, Jacobson, Stephen C, Lowndes, Douglas H, Simpson, Michael L

“…We describe the fabrication and electrochemical characterization of as-grown and postprocessed vertically aligned carbon nanofiber forest electrodes at…”
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An integrated CMOS microluminometer for low-level luminescence sensing in the bioluminescent bioreporter integrated circuit by Simpson, Michael L, Sayler, Gary S, Patterson, Greg, Nivens, David E, Bolton, Eric K, Rochelle, James M, Arnott, James C, Applegate, Bruce M, Ripp, Steven, Guillorn, Michael A

“…We report an integrated CMOS microluminometer for the detection of low-level bioluminescence in whole cell biosensing applications. This microluminometer is…”
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Time-resolved diagnostics of single wall carbon nanotube synthesis by laser vaporization by Puretzky, Alex A, Geohegan, David B, Schittenhelm, Henrik, Fan, Xudong, Guillorn, Michael A

“…Three questions important to nanosecond laser ablation synthesis of single wall carbon nanotubes (SWNTs) have been addressed using in situ spectroscopic…”
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Fabrication of dissimilar metal electrodes with nanometer interelectrode distance for molecular electronic device characterization by Guillorn, Michael A., Carr, Dustin W., Tiberio, Richard C., Greenbaum, Elias, Simpson, Michael L.

“…We report a versatile process for the fabrication of dissimilar metal electrodes with a minimum interelectrode distance of less than 6 nm using electron beam…”
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The electrodeposition of metal at metal/carbon nanotube junctions by Austin, Derek W., Puretzky, Alex A., Geohegan, David B., Britt, Phillip F., Guillorn, Michael A., Simpson, Michael L.

“…We deposited a semiconducting single-walled carbon nanotube on Pd electrodes, and the initial charge transport measurements showed the usual large contact…”
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Synthetic nanoscale elements for delivery of materials into viable cells by McKnight, Timothy E, Melechko, Anatoli V, Guillorn, Michael A, Merkulov, Vladimir I, Lowndes, Douglas H, Simpson, Michael L

“…Arrays of vertically aligned carbon nanofibers (VACNFs) provide structures that are well suited for the direct integration and manipulation of molecular-scale…”
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Effects of spatial separation on the growth of vertically aligned carbon nanofibers produced by plasma-enhanced chemical vapor deposition by Merkulov, Vladimir I., Melechko, Anatoli V., Guillorn, Michael A., Lowndes, Douglas H., Simpson, Michael L.

“…Vertically aligned carbon nanofibers (VACNFs) with vastly different spacing were grown by catalytically controlled dc glow discharge chemical vapor deposition…”
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Performance trade-offs in FinFET and gate-all-around device architectures for 7nm-node and beyond by Seong-Dong Kim, Guillorn, Michael, Lauer, Isaac, Oldiges, Phil, Hook, Terence, Myung-Hee Na

“…A comparative DC and AC performance evaluation between tri-gate FinFETs and gate-all-around nanowire FETs is carried out for potential sub-7nm technology node…”
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