Search Results - "Guerre, Roland"

Wafer-Level Transfer Technologies for PZT-Based RF MEMS Switches by Guerre, Roland, Drechsler, Ute, Bhattacharyya, Debabrata, Rantakari, Pekka, Stutz, Richard, Wright, Robert V, Milosavljevic, Zlatoljub D, Vaha-Heikkila, Tauno, Kirby, Paul B, Despont, Michel

“…We report on wafer-level transfer technologies to integrate PZT-based radio frequency (RF) microelectromechanical-systems switches on CMOS. Such heterogeneous…”
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Selective Transfer Technology for Microdevice Distribution by Guerre, R., Drechsler, U., Jubin, D., Despont, M.

“…We have developed a generic cost-efficient CMOS-compatible heterogeneous device integration method at wafer-scale level. This method enables the distribution…”
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Fast 10-μs microelectromechanical optical switch inside a planar hollow waveguide (PHW) by GUERRE, Roland, FAHRNI, Francis, RENAUD, Philippe

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